2010
DOI: 10.1038/nature08879
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Atom-by-atom structural and chemical analysis by annular dark-field electron microscopy

Abstract: Direct imaging and chemical identification of all the atoms in a material with unknown three-dimensional structure would constitute a very powerful general analysis tool. Transmission electron microscopy should in principle be able to fulfil this role, as many scientists including Feynman realized early on. It images matter with electrons that scatter strongly from individual atoms and whose wavelengths are about 50 times smaller than an atom. Recently the technique has advanced greatly owing to the introducti… Show more

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Cited by 1,224 publications
(1,070 citation statements)
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“…Atom-by-atom chemical analysis was performed based on quantitative intensity analysis of the deconvolved ADF image. The intensity from the impurity atoms is about 3.83 times the intensity obtained from the carbon atoms, which is close to the Z 1.6 ratio of 1:3.87 for Z ¼ 6 (C) and Z ¼ 14 (Si), respectively 29 . Furthermore, electron energy-loss spectroscopy analysis from a substitutional impurity atom with the same ADF image intensity ratio indicates that the impurities are Si atoms 30 .…”
Section: Methodssupporting
confidence: 77%
“…Atom-by-atom chemical analysis was performed based on quantitative intensity analysis of the deconvolved ADF image. The intensity from the impurity atoms is about 3.83 times the intensity obtained from the carbon atoms, which is close to the Z 1.6 ratio of 1:3.87 for Z ¼ 6 (C) and Z ¼ 14 (Si), respectively 29 . Furthermore, electron energy-loss spectroscopy analysis from a substitutional impurity atom with the same ADF image intensity ratio indicates that the impurities are Si atoms 30 .…”
Section: Methodssupporting
confidence: 77%
“…Modern transmission electron microscopes (TEM) allow imaging materials at a single atom resolution with acceleration voltages in the range of 20-300 kV [1][2][3] , foremost thanks to the practical realization of aberration correctors (AC) for transmission electron microscopy 4,5 . However, high electron doses are required for achieving a high enough signal to noise ratio for accurate detection of the atom position in the image.…”
Section: Introductionmentioning
confidence: 99%
“…Another novel technique for DNA uses transmission electron microscopy to directly visualise strands of DNA that have been suitably modified with heavy metal atoms to distinguish the bases (Krivanek et al 2010). This method is being developed and commercialised by several companies, including Halcyon Molecular and ZSGenetics.…”
Section: Atomicmentioning
confidence: 99%