Atmospheric pressure vapor-phase growth of ZnO using a chloride source

Nucleation and coalescence behavior for epitaxial ZnO layers on ZnO/sapphire templates grown by halide vapor phase epitaxy

“…Moreover, increasing of the input partial pressure of a Zn precursor to maintain the growth rate causes a pre-reaction between Zn and O precursors in the vapor phase by nature. Takahashi et al [13] demonstrated the growth of ZnO by halide vapor phase epitaxy (HVPE) in the temperature range from 550 to 950 1C using ZnCl 2 powder and O 2 gas. This implies that the sticking coefficient of ZnCl 2 is higher than that of Zn, and ZnCl 2 does not decompose at a temperature of 950 1C, leading to the growth of ZnO at high temperatures.…”

“…This implies that the sticking coefficient of ZnCl 2 is higher than that of Zn, and ZnCl 2 does not decompose at a temperature of 950 1C, leading to the growth of ZnO at high temperatures. To date, ZnCl 2 powder has been used as a starting material and vaporized by heating for HVPE growth [13,14]. Due to the unavailability of high-purity ZnCl 2 powder and the relatively high deliquescence, ZnCl 2 as the staring material for semiconductor-grade ZnO is not suitable.…”

Growing ZnO Crystals on Magnetite Nanoparticles

“…ZnO is currently in use, or being considered for use, as phosphors, [1] as component in electrooptical devices, [2±8] as piezoelectric transducers, [1,9,10] varistors, [1,11,12] UV and microwave absorbers, [1,10] gas sensors, [1,13,14,15] and for transparent conducting films. [1,16] ZnO can be grown by means of a variety of techniques including vapor-phase transport, [18,19] sol±gel methods, [19,20] hydrothermal growth, [21,22] melt growth, [23] chemical vapor deposition (MOCVD), [24] electrochemical deposition, [25±28] laser ablation, [29] sputtering, [30] molecular beam epitaxy, [31,32] and spraying arc-discharge. [33] However, large-scale use will require the development of simple, low-cost approaches.…”

Dependence of ZnO Nanostructured Thin Films Properties on Growth Temperature by APCVD Method

“…ZnO lms have been widely studied owing to their usefulness in electronic or optoelectronic applications, gas sensors, solar cell windows, and surface acoustic-wave devices [14]. sition (MOCVD) using diethylzinc (DEZ) and CO [15].…”