2015 International Conference on Quality in Research (QiR) 2015
DOI: 10.1109/qir.2015.7374885
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Atmospheric pressure plasma functionalization of carbon nanotube dot-array with two-stage plasma treatments for the development of bio-chip sensors

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“…The dry plasma processes used for the elaboration and functionalization of materials are varied. In fact, they differ according to the gas pressure, ranging from low pressure processes (a few Pa to 100 Pa) [48,54,[62][63][64] to atmospheric pressure processes [49,51,[55][56][57]65]. Low-pressure plasma processes are highly non-equilibrium thermodynamics means with high electron temperatures that can reach a few tens of electron-volts and a low degree of ionization [66].…”
Section: Introductionmentioning
confidence: 99%
“…The dry plasma processes used for the elaboration and functionalization of materials are varied. In fact, they differ according to the gas pressure, ranging from low pressure processes (a few Pa to 100 Pa) [48,54,[62][63][64] to atmospheric pressure processes [49,51,[55][56][57]65]. Low-pressure plasma processes are highly non-equilibrium thermodynamics means with high electron temperatures that can reach a few tens of electron-volts and a low degree of ionization [66].…”
Section: Introductionmentioning
confidence: 99%