Atmospheric Pressure Plasma Deposition of TiO2: A Review

Abstract

Atmospheric pressure plasma (APP) deposition techniques are useful today because of their simplicity and their time and cost savings, particularly for growth of oxide films. Among the oxide materials, titanium dioxide (TiO2) has a wide range of applications in electronics, solar cells, and photocatalysis, which has made it an extremely popular research topic for decades. Here, we provide an overview of non-thermal APP deposition techniques for TiO2 thin film, some historical background, and some very recent findings and developments. First, we define non-thermal plasma, and then we describe the advantages of APP deposition. In addition, we explain the importance of TiO2 and then describe briefly the three deposition techniques used to date. We also compare the structural, electronic, and optical properties of TiO2 films deposited by different APP methods. Lastly, we examine the status of current research related to the effects of such deposition parameters as plasma power, feed gas, bias voltage, gas flow rate, and substrate temperature on the deposition rate, crystal phase, and other film properties. The examples given cover the most common APP deposition techniques for TiO2 growth to understand their advantages for specific applications. In addition, we discuss the important challenges that APP deposition is facing in this rapidly growing field.

Plasma‐Assisted Deposition of Silk Fibroin on Different Surfaces

“…Plasma polymerization/deposition provides thin, uniform, and homogeneous layers of different materials with strong adhesion to a wide range of substrates. [ 29–31 ] Such strong adhesion accrues due to covalent bonds between functionalized substrate and deposited material, preventing delamination. [ 32–35 ] In order to evaluate the possibility of plasma deposition of silk fibroin using atmospheric pressure plasma torch (jet) on different materials, glass, PET, PDMS, and Ti6Al4V alloy were used as model substrates.…”

Fabrication of aerosol-based nanoparticles and their applications in biomedical fields

“…Titanium has a broad range of applications, being used in solar cells, electronics, biomedicine, and photocatalysis. Hence, thin Ti films have been synthesized using non-thermal atmospheric pressure plasma deposition methods, which are generally used in various fields (Banerjee et al 2020 ). Photoluminescent silicon nanoparticles have been prepared by using the non-thermal plasma technique and tested for their use as potential sensors and optoelectronics, as well as for their potential applications in medicine and natural sciences (Müller et al 2020 ).…”

Pulsed Discharge Plasma in High-Pressure Environment for Water Pollutant Degradation and Nanoparticle Synthesis

“…However, to create low-pressure conditions, a vacuum system is required, resulting in the operating system being complex and costly. Hence, applying a high-voltage discharge plasma under atmospheric and high-pressure conditions with argon as the gas phase may eliminate the demerits of the low-pressure condition [23][24][25][26][27]. However, new challenges arise due to the high voltage requirement for gas breakdown and the difficulty in sustaining discharge plasma under atmospheric and high-pressure conditions.…”