Atmospheric Pressure Microwave Plasma Jet for Organic Thin Film Deposition

Abstract

In this work, the potential of a microwave (MW)-induced atmospheric pressure plasma jet (APPJ) in film deposition of styrene and methyl methacrylate (MMA) precursors is investigated. Plasma properties during the deposition and resultant coating characteristics are studied. Optical emission spectroscopy (OES) results indicate a higher degree of monomer dissociation in the APPJ with increasing power and a carrier gas flow rate of up to 250 standard cubic centimeters per minute (sccm). Computational fluid dynamic (CFD) simulations demonstrate non-uniform monomer distribution near the substrate and the dependency of the deposition area on the monomer-containing gas flow rate. A non-homogeneous surface morphology and topography of the deposited coatings is also observed using atomic force microscopy (AFM) and SEM. Coating chemical analysis and wettability are studied by XPS and water contact angle (WCA), respectively. A lower monomer flow rate was found to result in a higher C–O/C–C ratio and a higher wettability of the deposited coatings.

Plasma‐Assisted Deposition of Silk Fibroin on Different Surfaces

“…Plasma polymerization/deposition provides thin, uniform, and homogeneous layers of different materials with strong adhesion to a wide range of substrates. [ 29–31 ] Such strong adhesion accrues due to covalent bonds between functionalized substrate and deposited material, preventing delamination. [ 32–35 ] In order to evaluate the possibility of plasma deposition of silk fibroin using atmospheric pressure plasma torch (jet) on different materials, glass, PET, PDMS, and Ti6Al4V alloy were used as model substrates.…”

A novel two‐dimensional atmospheric pressure plasma jet device

“…Nowadays, there are rapidly growing interest in developing 2D miniaturized plasma for surface modification and chemical vapor deposition. [20][21][22] Besides, there are also many studies on cold atmospheric plasma jets in the kHz and MHz frequency bands. In 2015, Robert et al developed a plasma gun for the study of helium and neon plasma propagation inside a dielectric tube.…”

Impact of Microwave Plasma Torch on the Yeast Candida glabrata

“…Our recently developed surface wave-initiated microwave torch [30][31][32][33][34][35] can also be a source of low-temperature plasma. In this case, the plasma is produced by an electromagnetic wave that travels along the interface between the plasma and the dielectric [36].…”

“…In the microwave discharge, the plasma has a higher electron temperature than plasma obtained by the indirect and high-frequency discharge. Due to the high temperature of the electrons, there is also a higher dissociation and ionization degree, which is reflected in a wide range of uses of this type of discharge including wound healing [30][31][32][33], surface decontamination of fruits [34] or deposition of thin layers [35]. This paper focuses on the first use of this discharge in the yeast Candia glabrata as a model microorganism.…”