Atmospheric-Pressure Mass Spectrometry by Single-Mode Nanoelectromechanical Systems

Abstract

Weighing particles above the megadalton mass range has been a persistent challenge in commercial mass spectrometry. Recently, nanoelectromechanical systems-based mass spectrometry (NEMS-MS) has shown remarkable performance in this mass range, especially with the advance of performing mass spectrometry under entirely atmospheric conditions. This advance reduces the overall complexity and cost while increasing the limit of detection. However, this technique required the tracking of two mechanical modes and the accurate knowledge of mode shapes that may deviate from their ideal values, especially due to air damping. Here, we used a NEMS architecture with a central platform, which enables the calculation of mass by single-mode measurements. Experiments were conducted using polystyrene and gold nanoparticles to demonstrate the successful acquisition of mass spectra using a single mode with an improved areal capture efficiency. This advance represents a step forward in NEMS-MS, bringing it closer to becoming a practical application for the mass sensing of nanoparticles.

Imaging Nanomechanical Vibrations and Manipulating Parametric Mode Coupling via Scanning Microwave Microscopy

“…To date, various sensitive transduction schemes have been achieved for detecting and manipulating nanomechanical resonators. These mainly include methods based on electrical detection or optical interferometry. − The former technology is widely used for testing electrically integrated nanomechanical systems, which requires the design and nanofabrication of on-chip circuits to detect and control vibrating elements. However, this technique does not have the spatial resolution required to study localized mechanical vibrations.…”