2006
DOI: 10.1002/cvde.200606502
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Atmospheric Pressure CVD of Molybdenum Diselenide Films on Glass

Abstract: Atmospheric pressure (AP)CVD of molybdenum diselenide films on glass substrates was achieved by reaction of diethyl selenide or di-tert-butylselenide with MoCl 5 at 500-650°C. X-ray diffraction (XRD) showed that the MoSe 2 films were crystalline with a mixed 2Hb/3R polytype stacking and typical cell constants of a = 3.28, c = 6.48 Å (c-axis is × 2 for the 2Hb form and × 3 for the 3R form). Energy dispersive X-ray analysis (EDAX) gave a Mo/Se ratio close to 1:2 for films formed at 600-650°C, those formed at low… Show more

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Cited by 53 publications
(36 citation statements)
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“…Water droplets of up to 100 mg were stationary at a 908 tip angle. This unusual wetting be- www.chemeurj.org haviour was, however, not demonstrated by similar diselenide systems (TiSe 2 , [105] VSe 2 , [106] NbSe 2 , [107] MoSe 2 [108] ). The formation of poly-p-xylylenes is a contrasting example of a Cassie-Baxter wetting surface.…”
Section: Breakdown Of Trimethyla C H T U N G T R E N N U N G Meth-mentioning
confidence: 85%
“…Water droplets of up to 100 mg were stationary at a 908 tip angle. This unusual wetting be- www.chemeurj.org haviour was, however, not demonstrated by similar diselenide systems (TiSe 2 , [105] VSe 2 , [106] NbSe 2 , [107] MoSe 2 [108] ). The formation of poly-p-xylylenes is a contrasting example of a Cassie-Baxter wetting surface.…”
Section: Breakdown Of Trimethyla C H T U N G T R E N N U N G Meth-mentioning
confidence: 85%
“…by gas source CVD, there has been renewed interest in its use for the synthesis of monolayer and few-layer chalcogenide films such as MoS2 [75][76][77] and WSe2. [78][79][80][81] A variety of precursors have been employed for the growth of 2D materials including metal carbonyls (W(CO)6 75,80 and Mo(CO)6 [75][76][77] ), halides (MoCl5, 66 WCl6, 65,78 NbCl5 68 ), metalorganics ((CH3)3Bi, 62,82,83 ), organo-chalcogen compounds ((CH3)2Se, 80 , (C2H5)2Se, 65,78,82,84 (C4H9)2Se, 66,68 (C2H5)2S, 75 (C4H9)2S, 77 (C2H5)2Te, 83,85 (C3H7)2Te 62 ), and hydrides (H2S, 76 H2Se 80 ). Except for the hydrides which are supplied as gases, the precursors are typically liquids or solids at room temperature with low to moderate vapor pressure.…”
Section: Milestonesmentioning
confidence: 99%
“…Therefore, it is significant to study the electrical properties of MoSe 2 . Up to now, many preparatory techniques have been used to obtain the MoSe 2 films, such as chemical vapor deposition (CVD), sputtering and electrodeposition and chemical bath deposition (CBD) [4][5][6][7][8]. The radio frequency (RF) magnetron sputtering method is emerged as an important method due to the high deposition rate, large area deposition and good physical and chemical properties of the films.…”
Section: Introductionmentioning
confidence: 99%