2024
DOI: 10.1002/smtd.202400167
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Atmospheric Pressure Alkaline Etching of MFI Zeolite Under Mild Temperature Toward Hollow Microstructure and Ultralow k Film

Kaipeng Zhang,
Ruilan Xu,
Rui Wang
et al.

Abstract: Constructing a hollow structure inside zeolite is very helpful for improving its performance. Unlike the conventional alkaline etching technique usually operated at high temperature (typically 170 °C) and high pressure (autogenerated in autoclave), here, it is discovered that zeolite MFI nano‐box can be achieved under mild etching conditions of atmospheric pressure and low temperature of 80 °C, making it very attractive for energy conservation and practical applications. A hollow‐structure formation mechanism … Show more

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