At-focus scanning ptychography for high resolution imaging with a wide field of view

Abstract

From manufacturing to medicine, there is a demand for phase-resolved, high resolution imaging of large samples. Here we present at-focus scanning ptychography (AFSP), a novel ptychographic metrology station designed for high resolution imaging over a large field of view. AFSP builds on scanning ptychography, but samples remain stationary during the imaging process, allowing for in-situ imaging. We demonstrate a resolution of 44.19μm, present images of spherical and freeform optics with a FOV of over 4cm, and validate the fidelity of the AFSP system by comparing it to established commercial instruments. AFSP’s comparable performance underscores its credibility as a valuable addition to quantitative phase imaging technologies.