Astigmatic Detection System With Feedback Mechanism for Calibrating Driving Waveform of Piezoelectric Actuators

Abstract

Piezoelectric actuators are used extensively in precision measurement, manufacturing, and manipulation owing to their high resolution, rapid response, and considerable force output. However, the nonlinear characteristics of piezoelectric materials, including hysteresis and creep, increase the complexity to achieve accurate positioning. Common methods rely on creating an inverse model of the actuator to enable linear movement. This study presents a novel calibration method based on an astigmatic detection system for directly measuring the calibrated driving waveform. This method can be applied to various types of piezoelectric actuators and does away with the need for complicated modeling and parameter identification. The experiment section demonstrates the calibration process of a piezoelectric XYZ scanner. The test results reveal that the linearity of the XYZ scanner, driven by the calibrated driving waveforms, closely approximates that of a commercial closedloop nanopositioner. Additionally, atomic force microscopy This work was financially supported by the National Science and Technology Council of Taiwan (MOST 111-2221-E-002-162 and NSTC 112-2221-E-002-246) and the LEO Foundation (Grant No. LF-OC-20-000370).