Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)
DOI: 10.1109/iciprm.1994.328185
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Assessment of the strain of InP films on Si obtained by HVPE conformal growth

N. Piffault1,
O. Parillaud2,
E. Gil-Hafon3
et al.
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