Assessment of effective-medium theories of ion-beam sputtered Nb&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;5&lt;/sub&gt;–SiO&lt;sub&gt;2&lt;/sub&gt; and ZrO&lt;sub&gt;2&lt;/sub&gt;–SiO&lt;sub&gt;2&lt;/sub&gt; mixtures

Tolenis, Tomas; Gaspariūnas, Mindaugas; Lelis, Martynas; Plukis, A.; Buzelis, Rytis; Melninkaitis, Andrius

doi:10.3952/lithjphys.54205

Cited by 1 publication

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References 31 publications

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“…For refractive index determination low absorption spectral zones were investigated and monolayers were considered as low or nonabsorbing. Volumetric fraction of selected materials in mixture layers were calculated according to Bruggemann's formula [16] and using index dispersion data of selected pure monolayer coatings. Thermal annealing was performed in SNOL 8.2/1100 heating furnace ensuring temperature repeatability of less than 1°C.…”

Section: Methodsmentioning

confidence: 99%

Post deposition annealing of IBS mixture coatings for compensation of film induced stress

Kičas¹,

Gimževskis²,

Melnikas³

2016

Opt. Mater. Express

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In this work, the influence of using ion beam sputtered mixtures instead of pure materials and the impact of applied post deposition annealing to residual stress is investigated. Single layer pure films and mixtures of Nb 2 O 5 / SiO 2 as well as multilayer coatings are examined by the means of residual stress. High residual compressive stress was measured for all as-deposited samples. Pure and mixed monolayer samples were annealed at various temperatures and residual stress was determined after each annealing routine. Residual changes in optical constants, layer thickness and surface roughness upon annealing are examined to explain stress behavior. Obtained data was used to make optimization of high reflectivity structures with completely eliminated residual stress. The proposed method can be used to coat very thin substrates where flatness requirements are essential.

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Section: Methodsmentioning

confidence: 99%