Assessment and verification of thickness homogeneity in mask blank by utilizing main harmonics of triple-surface interferometry

Kim, Sungtae; Kim, Yangjin; Sugita, Naohiko; Mitsuishi, Mamoru

doi:10.1016/j.precisioneng.2023.10.003

Precision Engineering

2024

DOI: 10.1016/j.precisioneng.2023.10.003

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Assessment and verification of thickness homogeneity in mask blank by utilizing main harmonics of triple-surface interferometry

Sungtae Kim,

Yangjin Kim,

Naohiko Sugita

et al.

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Assessment and verification of thickness homogeneity in mask blank by utilizing main harmonics of triple-surface interferometry

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References 33 publications

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