ASPHERO5: Using Advanced Tactile Surface Analysis for Economic Fabrication of Precision Optics

Thieß, H.; Giggel, Volkmar; Börret, Rainer; Birnbaum, Uwe; Haag-Pichl, M

doi:10.1364/oft.2006.oftua2

Cited by 1 publication

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“…It introduces figure errors and reduces the surfaces microroughness (smoothing effect). As already published [1] the rms and PV of the long wave error is also dominated by the kind of metrology device, used to generate the data. The short wavelength band as a fingerprint of the polishing process converges asymptotically to a final value which is limited by the metrology device.…”

Section: Sd Tool For Analyzing Surfacesmentioning

confidence: 89%

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ASPHERO5 – Simulation and Analysis of Aspherical Polishing Process

Boerret

Kelm

Thieß

et al. 2007

KEM

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ASPHERO5 is a funded German research project (project prime: Schneider OpticalMachines) with the goal of economic fabrication of high precision aspheres. The research is concentrated on the classical process chain consisting of grinding and polishing. The characterization of the incoming and outgoing surface quality is one issue to characterize the improvements. The variation of the local removal rate related to local curvature is one of the limiting factors of the polishing process. In this paper we report on first results characterizing the surface quality with a PSD (Power Spectral Density) algorithm and analyzing the local removal rates for the polishing step. In our research, two types of aspheres with 30 and 60 mm diameter were polished with a spinning tool process. The final deviation between simulation and experiment was less than 10 percent. That’s the starting point for further investigations within the project.

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Section: Sd Tool For Analyzing Surfacesmentioning

confidence: 89%

“…Ground surfaces of optical elements are typically characterized by surface roughness and shape deviations, which are measured with a tactile metrology device [1], such like a Talysurf or a generating polishing coating Design Coordinate Measuring Device (CMD) e.g. Zeiss UPMC [2].…”

Section: Sd Tool For Analyzing Surfacesmentioning

confidence: 99%