2017
DOI: 10.3390/s17061355
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Aspheric Surface Measurement Using Capacitive Sensors

Abstract: This paper proposes a new method for the measurement of spherical coordinates by using capacitive sensors as a non-contact probe solution of measurement of aspheric surfaces. The measurement of the average effect of the capacitive probe and the influence of capacitive probe tilting were studied with respect to an eccentric spherical surface. Based on the tested characteristic curve of the average effect of the sphere and probe, it was found that nonlinear and linear compensation resulted in high measurement ac… Show more

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Cited by 6 publications
(4 citation statements)
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References 13 publications
(15 reference statements)
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“…In [84]- [86], segment cylindrical capacitive sensors are used to measure the radial and axial error motion of rotating machinery. In [87], capacitive probes are used to measure the aspheric surface. In [88], a CPS with interdigital fingers is used for detection of microdroplet size and speed (as shown in Figure 15).…”
Section: B Capacitive Displacement Sensing For Indirect Measurementsmentioning
confidence: 99%
“…In [84]- [86], segment cylindrical capacitive sensors are used to measure the radial and axial error motion of rotating machinery. In [87], capacitive probes are used to measure the aspheric surface. In [88], a CPS with interdigital fingers is used for detection of microdroplet size and speed (as shown in Figure 15).…”
Section: B Capacitive Displacement Sensing For Indirect Measurementsmentioning
confidence: 99%
“…The Shack Hartmann wavefront detector (hereafter referred to as Hartmann) is one of the core devices of the adaptive optics system. Its detection ability directly determines the resolution of the target imaging [1][2][3][4]. In order to improve its spatial resolution, we introduce compression perception technology.…”
Section: Introductionmentioning
confidence: 99%
“…With the rapid development of ultra-precision machining technology, aspheric detection technology, and error compensation technology, the demand for optical components has immensely increased; this is because optical lenses play a vital role in modern machining & vision systems [1][2][3] . The application of optical lenses can be traced within diverse industries, Such as Medical, Aerospace & Defense, Life science, Semiconductor, Entertainment, Imaging, etc.…”
Section: Introductionmentioning
confidence: 99%