Abstract:As a high-efficiency silicon solar cell concept amorphous silicon/crystalline silicon (a-Si:H(n,p)/c-Si (p,n)) hetero-junction solar cells are of great scientific interest [1, . The a-Si:H emitter is deposited by plasma-enhanced chemical vapor deposition (PECVD). The biggest challenge is to avoid recombination at the a-Si:H(i)/c-Si interface where the p-n junction is located. A clean, smooth, hydrogen terminated c-Si surface is supposed to be mandatory for a high passivation quality of the deposited layer [3, … Show more
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