2022
DOI: 10.3390/nano12030311
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Artificial Neurons and Synapses Based on Al/a-SiNxOy:H/P+-Si Device with Tunable Resistive Switching from Threshold to Memory

Abstract: As the building block of brain-inspired computing, resistive switching memory devices have recently attracted great interest due to their biological function to mimic synapses and neurons, which displays the memory switching or threshold switching characteristic. To make it possible for the Si-based artificial neurons and synapse to be integrated with the neuromorphic chip, the tunable threshold and memory switching characteristic is highly in demand for their perfect compatibility with the mature CMOS technol… Show more

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Cited by 9 publications
(4 citation statements)
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References 46 publications
(49 reference statements)
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“…[16,19] The TS behavior is most likely elucidated by the decomposition of weak partially-formed Ag CFs assisted by Joule heating. [8] Investigation of the behavior of sericin under injection of Ag ions has not employed from the device itself due to the difficulty of etching the Ag TE to expose the sericin layer or slicing the sericin layer for the later characterization, which will be characterized by TEM in future research. In addition, the potential scalability of sericin-based device is worth further investigating but many challenging issues need to be solved, such as developing an effective solution-processed technique for fabricating high-quality and large-scale uniform material film, utilizing a sacrificial layer (e.g., a parylene layer) to make sericin compatible with complementary metal-oxide-semiconductor (CMOS) fabrication processes, scaling device to 10 nm dimension, exploring thermal stability, and exploiting advanced characterization methods to clarify the mechanism.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…[16,19] The TS behavior is most likely elucidated by the decomposition of weak partially-formed Ag CFs assisted by Joule heating. [8] Investigation of the behavior of sericin under injection of Ag ions has not employed from the device itself due to the difficulty of etching the Ag TE to expose the sericin layer or slicing the sericin layer for the later characterization, which will be characterized by TEM in future research. In addition, the potential scalability of sericin-based device is worth further investigating but many challenging issues need to be solved, such as developing an effective solution-processed technique for fabricating high-quality and large-scale uniform material film, utilizing a sacrificial layer (e.g., a parylene layer) to make sericin compatible with complementary metal-oxide-semiconductor (CMOS) fabrication processes, scaling device to 10 nm dimension, exploring thermal stability, and exploiting advanced characterization methods to clarify the mechanism.…”
Section: Resultsmentioning
confidence: 99%
“…[6,7] In order to guarantee the synapse matrix works effectively, volatile threshold switching (TS) devices are needed to simulate integrate-and-fire function of neurons. [8] Nevertheless, many neural devices used for SNNs are the mainstream complementary metal-oxidesemiconductor (CMOS) neurons that are indispensable for realizing of sophisticated circuits, which are considered unsuitable for large-scale network implementation due to their large area and low efficiency. [9,10] As a result, it is urgently expected to develop functional neuronal devices that enable the achievements of the basic functions of spiking neurons including the integration behavior and the firing action with simple circuits.…”
Section: Introductionmentioning
confidence: 99%
“…Использование процессов с низким термическим бюджетом крайне важно, так как позволяет получать мемристорные структуры в конце всех технологических процессов (так называемые back-end-of-line процессы [10]). Недавно была продемонстрирована возможность создания мемристоров на основе пленок гидрогенизированного оксинитрида кремния (a−SiO x N y : H) для нейронных сетей [11]. Поскольку метод РФЭС является поверхностночувствительным, была проведена оценка глубины анализа изученных образцов.…”
Section: Introductionunclassified
“…The use of processes with a low thermal budget is extremely important, as it allows obtaining memristor structures at the end of all technological processes (the so-called back-end-of-line processes [10]). Recently, the possibility of creating memristors based on films of hydrogenated silicon oxynitride (a−SiO x N y : H) for neural networks [11] has been demonstrated.…”
Section: Introductionmentioning
confidence: 99%