Artificial neural network assisted spectral scatterometry for grating quality control
Aleksi Mattila,
Johan Nysten,
Ville Heikkinen
et al.
Abstract:Spectral scatterometry is a technique that allows rapid measurements of diffraction efficiencies of diffractive optical elements (DOEs). The analysis of such diffraction efficiencies has traditionally been laborious and time consuming. However, machine learning can be employed to aid in the analysis of measured diffraction efficiencies. In this paper we describe a novel system for providing measurements of multiple measurands rapidly and concurrently using a spectral scatterometer and an Artificial Neural Netw… Show more
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