Arrays of millimeter-wave silicon waveguides for interchip communication on glass interposer

Abstract

High capacity, guided, millimeter wave communication between integrated circuits is investigated with emphasis on a glass interposer integrated architecture. Silicon rectangular waveguides with integrated internal probes are designed both from the point of view of circuit theory and antenna theory in the presence of a sub cutoff wavelength backwall taper. Simulation results are compared with vector network analyzer results up to 110 GHz.