Arrayed SU-8 polymer thermal actuators with inherent real-time feedback for actively modifying MEMS’ substrate warpage

Wang, Xinghua; Xiao, Dingbang; Chen, Zhihua; Wu, Xuezhong

doi:10.1088/0960-1317/26/9/095011

Cited by 3 publications

(1 citation statement)

References 32 publications

(34 reference statements)

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“…For these steps, the process simplicity and flexibility are determined by the selection of the sacrificial layers. The processing flow depicted in Figure 1 can be used for non-photosensitive polymeric sacrificial layers, metallic sacrificial layers or silicic ones [2,[13][14][15][16][17]. Other photoresist types can be used as sacrificial layers [6,8,18,19].…”

Section: Introductionmentioning

confidence: 99%

A Simple and Robust Fabrication Process for SU-8 In-Plane MEMS Structures

Cretu

2020

Micromachines

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In this paper, a simple fabrication process for SU-8 in-plane micro electro-mechanical systems (MEMS) structures, called "border-bulk micromachining", is introduced. It aims to enhance the potential of SU-8 MEMS structures for applications such as low-cost/disposable microsystems and wearable MEMS. The fabrication process is robust and uses only four processing steps to fabricate SU-8 in-plane MEMS structures, simplifying the fabrication flow in comparison with other reported attempts. The whole fabrication process has been implemented on copper-polyimide composites. A new processing method enables the direct, laser-based micromachining of polyimide in a practical way, bringing in extra processing safety and simplicity. After forming the polymeric in-plane MEMS structures through SU-8 lithography, a copper wet etching masked by the SU-8 structure layers is carried out. After the wet etching, fabricated in-plane MEMS structures are suspended within an open window on the substrate, similar to the final status of in-plane MEMS devices made from industrial silicon micromachining methods (such as SOIMUMPS). The last step of the fabrication flow is a magnetron sputtering of aluminum. The border-bulk micromachining process has been experimentally evaluated through the fabrication and the characterization of simple in-plane electrically actuated MEMS test structures. The characterization results of these simple test structures have verified the following process qualities: controllability, reproducibility, predictability and general robustness.Micromachines 2020, 11, 317 2 of 16 process to form microstructures, with its simplicity leading to a low fabrication cost, while SU-8 has better mechanical properties and chemical stability, in comparison with other photoresists [3,4]. For the fabrication of both out-of-plane and in-plane SU-8 electrostatic MEMS structures, the most commonly used fabrication flow is layer-by-layer surface micromachining [5][6][7][8][9][10][11][12]. The generic schematic of a layer-by-layer SU-8 micromachining process is illustrated in Figure 1.Micromachines 2020, 11, x 2 of 17The fabrication cost, speed and process simplicity are vital to polymeric MEMS structures and their applications. This explains why SU-8 series negative photoresist has been advantageous and popular as structural layers for polymeric MEMS devices. Such processes require only a single lithography process to form microstructures, with its simplicity leading to a low fabrication cost, while SU-8 has better mechanical properties and chemical stability, in comparison with other photoresists [3,4]. For the fabrication of both out-of-plane and in-plane SU-8 electrostatic MEMS structures, the most commonly used fabrication flow is layer-by-layer surface micromachining [5][6][7][8][9][10][11][12]. The generic schematic of a layer-by-layer SU-8 micromachining process is illustrated in Figure 1.

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Section: Introductionmentioning

confidence: 99%

A Simple and Robust Fabrication Process for SU-8 In-Plane MEMS Structures

Cretu

2020

Micromachines

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Evidences of non-linear short-term stress relaxation in polymers

Schiavi

Prato

2017

Polymer Testing

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Al/Ti-film-resistor based thermal heater with Zig-Zag configuration for MEMS application

Wang¹,

Jiang²,

Qin³

et al. 2020

IOP Conf. Ser.: Mater. Sci. Eng.

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In this paper, we proposed a micro-heater based on Al/Ti-film resistors for MEMS application. The film heater, designed with unique Zig-Zag configuration, has a high heating efficiency as generated Joule heat could be confined in Zig-Zag area. Consequently, much higher maximum temperature could be achieved under the lower applied voltage, compared with conventional strategy. Based on MEMS technique, thin film based micro-heater was fabricated, and experimental characterization was carried out in room temperature. Since the micro-heaters are all in the form of thin film-resistors, the structure design is simple and fabrication process compatibility is good, which is particularly suitable in the fields of MEMS integration and actuation application.

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Arrayed SU-8 polymer thermal actuators with inherent real-time feedback for actively modifying MEMS’ substrate warpage

Cited by 3 publications

References 32 publications

A Simple and Robust Fabrication Process for SU-8 In-Plane MEMS Structures

A Simple and Robust Fabrication Process for SU-8 In-Plane MEMS Structures

Evidences of non-linear short-term stress relaxation in polymers

Al/Ti-film-resistor based thermal heater with Zig-Zag configuration for MEMS application

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