Array-driven ultrasonic microactuators

Furuhata, T.; Hirano, T.; Fujita, Hiroyuki

doi:10.1109/sensor.1991.149078

Cited by 26 publications

(15 citation statements)

References 4 publications

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“…Conveyors consisting of arrays of manipulators using pneumatics, electromagnetics, piezoelectric, electrostatic and electrothermal actuation principles have been proposed in the past [18][19][20]. Conveyors provide a way to work around the stricter payload, energy, force and size constraints demanded by robot mobility.…”

Section: Introductionmentioning

confidence: 99%

ARRIpede: An Assembled Die-Scale Microcrawler

et al. 2011

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The combination of three-dimensional microassembly and bulk micromachining allows manufacturing robots that are small, precise, dexterous and that have a large payload carrying capacity. In this paper, we present a mobile micropositioner, or a microcrawler robot constructed by microassembly, that can carry more than twice its own weight. The 'ARRIpede' spans a volume of 1.2 cm × 1.2 cm × 1 cm consisting of a multi-legged micromechanical module packaged with an electronic backpack. The micromechanical module consists of high-stiffness microassembled joints powered by electrothermal actuators. The backpack consists of a Li-polymer battery and power electronics boards designed to power the electrothermal actuators. The robot has been designed using a stick-slip simulation model to carry a payload up to 9 g and reach linear velocities up to 3 mm/s. The micromanufacturing sequences covering fabrication, microassembly and packaging are detailed in this paper. Packaged prototypes are evaluated experimentally to verify the leg actuation force, payload carrying capacity, power consumption, precision, crawling velocity and steering ability.

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Section: Introductionmentioning

confidence: 99%

ARRIpede: An Assembled Die-Scale Microcrawler

et al. 2011

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“…Therefore, arranging microactuators in array configurations to allow the actuators working together becomes a popular approach, which not only can increase the total force and load capacity of the micro-conveyance systems, but also take advantage in MEMS batch fabrication process. Microactuators developed for microconveyance systems can be classified into different actuation schemes, such as thermal bimorphs (Ataka et al 1993), air jets (Konishi and Fujita 1994;Pister et al 1990), torsional resonators (Mita et al 1997), electromagnetic (Liu et al 1995;Nakazawa et al 1997), piezoelectric (Furuhata et al 1991), and electrostatic (Edo et al 1999). The ciliary motion principle proposed by Ataka et al (1993) used thermal bimorph polyimide legs which were actuated asynchronously to provide propulsion for micro-objects.…”

Section: Introductionmentioning

confidence: 99%

Design and fabrication of an electrothermal microactuator for multi-level conveying

Hsu

2005

Microsyst Technol

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During the past years, a variety of microactuators developed for micro-conveyors have been presented. However, such micro-conveyors can only provide conveying motion in a single plane. Here an electrothermally driven microactuator with a capability of adjustable height is proposed, which may act as a basic unit for multi-level conveyors. This microactuator is based on the principle of thermal bimorph actuation with two long conveying fingers to exert out-of-plane bending motions in the transversal direction, which are connected and lifted by an initially curved height adjuster in the longitudinal direction. The devices can provide conveyance of micro-objects between two plane levels of different heights. The testing results show that the two fingers and a height adjuster can be actuated simultaneously and individually with little thermal crosstalk. The proposed device with a dimension of 900·100·4.5 lm 3 can provide 5 lm vertical displacements by the height adjuster at 1 V and 18 lm lateral displacements by the conveying finger at 2 V. Simulations by finite-element program ANSYS 5.7 have been performed and widely match with testing results.

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“…been used including air jets [5]- [7], electromagnetic actuators [8]- [10], piezoelectric actuators [11], electrostatic actuators [12], thermal-bimorph (bimaterial) actuators [13]- [16], and electrothermal (single-material) actuators [17], [18]. Whatever the chosen method, the actuators have two fundamental requirements: 1) the generation of enough force or torque to move not only themselves but also to move external objects, and 2) the generation of large displacements of the moving parts or of the media (e.g., air jets) in which the parts move.…”

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confidence: 99%

CMOS integrated ciliary actuator array as a general-purpose micromanipulation tool for small objects

Suh

Darling

Böhringer

et al. 1999

J. Microelectromech. Syst.

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The first micromachined bimorph organic ciliary array with on-chip CMOS circuitry is presented. This ciliary array is composed of an 8 2 8 array of cells each having four orthogonally oriented actuators in an overall die size of 9.4 2 9.4 mm. The polyimide-based actuators were fabricated directly above the selection and drive circuitry. Selection and activation of actuators in this array shows that integration was successful. The array was programmed to do simple linear and diagonal translations and squeeze-, centering-, and rotating-field manipulations. All three tasks were demonstrated using silicon pieces of various shapes and either 0.55 mm or 0.10 mm thick.[365]

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Array-driven ultrasonic microactuators

Cited by 26 publications

References 4 publications

ARRIpede: An Assembled Die-Scale Microcrawler

ARRIpede: An Assembled Die-Scale Microcrawler

Design and fabrication of an electrothermal microactuator for multi-level conveying

CMOS integrated ciliary actuator array as a general-purpose micromanipulation tool for small objects

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