Array antennas using low loss MEMS phase shifters

Lee, J.J.; Quan, Clifton; Allison, R.; Reinehr, A.; Pierce, Brian M.

doi:10.1109/aps.2002.1016017

Cited by 8 publications

(3 citation statements)

References 1 publication

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“…Radio frequency micro-electro-mechanical system (RF-MEMS)-based phase shifters that are typically used for broadband applications are small in size, offer low transmission loss at microwave and millimetre wave frequencies, provide improved power handling capability and are compatible with traditional MMIC circuits [1]. Moreover, RF-MEMS phase shifters can also be used to realize MCM (multi-chip-module) and SOC (system-on-chip) with highdensity package that leads to the reduction of size and weight of RF components [2][3][4]. To improve the performance of a microwave phase shifter over the band of interest, the most relevant parameters are the operating bandwidth, switching speed, relative phase difference ( φ), insertion loss, return loss and intermodulation distortions (IMD) [5].…”

Section: Introductionmentioning

confidence: 99%

Design and development of a CPW-based 5-bit switched-line phase shifter using inline metal contact MEMS series switches for 17.25 GHz transmit/receive module application

Dey¹,

Koul²

2013

J. Micromech. Microeng.

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A radio frequency micro-electro-mechanical system (RF-MEMS) phase shifter based on switchable delay line concept with maximum desirable phase shift and good reliability is presented in this paper. The phase shifter is based on the switchable reference and delay line configurations with inline metal contact series switches that employs MEMS systems based on electrostatic actuation and implemented using coplanar waveguide (CPW) configuration. Electromechanical behaviour of the MEMS switch has been extensively investigated using commercially available simulation tools and validated using system level simulation. A detailed design and performance analysis of the phase shifter has been carried out as a function of various structural parameters with reference to the gold-based surface micromachining process on alumina substrate. The mechanical, electrical, transient, intermodulation distortion (IMD) and loss performance of an MEMS switch have been experimentally investigated. The individual primary phase-bits (11.25°/22.5°/45°/90°/180°) that are fundamental building blocks of a complete 5-bit phase shifter have been designed, fabricated and experimentally characterized. Furthermore, two different 5-bit switched-line phase shifters, that lead to 25% size reduction and result in marked improvement in the reliability of the complete 5-bit phase shifter with 30 V actuation voltage, have been developed. The performance comparison between two different CPW-based switched-line phase shifters have been extensively investigated and validated. The complete 5-bit phase shifter demonstrates an average insertion loss of 5.4 dB with a return loss of better than 14 dB at 17.25 GHz. The maximum phase error of 1.3° has been obtained at 17.25 GHz from these 5-bit phase shifters.

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Section: Introductionmentioning

confidence: 99%

Design and development of a CPW-based 5-bit switched-line phase shifter using inline metal contact MEMS series switches for 17.25 GHz transmit/receive module application

Dey¹,

Koul²

2013

J. Micromech. Microeng.

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“…Utilizing these switches in true-time-delay (TTD) phase shifters can drastically reduce loss, and thus can significantly reduce the cost and weight for a phased-array antenna where thousands of phase shifters are mounted on the T/R module. TTD refers to the invariance of time delay with frequency and demonstrates a high-range resolution in the form of ultra-wideband radar waveforms without frequency scanning or beam squinting [2,3].…”

Section: Introductionmentioning

confidence: 99%

Design and development of a surface micro-machined push–pull-type true-time-delay phase shifter on an alumina substrate for Ka-band T/R module application

Dey¹,

Koul²

2012

J. Micromech. Microeng.

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A radio frequency micro-electro-mechanical system (RF-MEMS) phase shifter based on the distributed MEMS transmission line (DMTL) concept towards maximum achievable phase shift with low actuation voltage with good figure of merit (FOM) is presented in this paper. This surface micro-machined analog DMTL phase shifter demonstrates low power consumption for implementation in a Ka-band transmit/receive (T/R) module. The push-pull-type switch has been designed and optimized with an analytical method and validated with simulation, which is the fundamental building block of the design of a true-time-delay phase shifter. Change in phase has been designed and optimized in push and pull states with reference to the up-state performance of the phase shifter. The working principle of this push-pull-type DMTL phase shifter has been comprehensively worked out. A thorough detail of the design and performance analysis of the phase shifter has been carried out with various structural parameters using commercially available simulation tools with reference to a change in phase shift and has been verified using a system level simulation. The phase shifter is fabricated on the alumina substrate, using a suspended gold bridge membrane with a surface micromachining process. Asymmetric behaviour of push-pull bridge configuration has been noted and a corresponding effect on mechanical, electrical and RF performances has been extensively investigated. It is demonstrated 114 • dB −1 FOM over 0-40 GHz band, which is the highest achievable FOM from a unit cell on an alumina substrate reported so far. A complete phase shifter contributes to a continuous differential phase shift of 0 • -360 • over 0-40 GHz band with a minimum actuation voltage of 8.1 V which is the highest achievable phase shift with the lowest actuation voltage as per till date on the alumina substrate with good repeatability and return loss better than 11.5 dB over 0-40 GHz band.

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“…GaAs MMIC phase shifters have been in development since the early 1980's [5][6][7], and they are now commercially available as cataloged parts [8][9][10]. The first RF MEMS phase shifters were not reported until 1999 [11], but since then, many circuits covering the frequency range from 8 to 94 GHz have been reported [12][13][14][15][16][17]. Both GaAs MMIC phase shifters and MEMS phase shifters have advantages and disadvantages.…”

Section: Phase Shiftersmentioning

confidence: 99%

RF MEMS phase shifters and their application in phase array antennas

Scardelletti¹,

Ponchak²

The 2005 IEEE Annual Conference Wireless and Micrwave Technology, 2005.

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Array antennas using low loss MEMS phase shifters

Cited by 8 publications

References 1 publication

Design and development of a CPW-based 5-bit switched-line phase shifter using inline metal contact MEMS series switches for 17.25 GHz transmit/receive module application

Design and development of a CPW-based 5-bit switched-line phase shifter using inline metal contact MEMS series switches for 17.25 GHz transmit/receive module application

Design and development of a surface micro-machined push–pull-type true-time-delay phase shifter on an alumina substrate for Ka-band T/R module application

RF MEMS phase shifters and their application in phase array antennas

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