2017
DOI: 10.1016/j.mseb.2016.11.003
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Argon plasma treatment of silicon nitride (SiN) for improved antireflection coating on c-Si solar cells

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Cited by 17 publications
(6 citation statements)
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“…Fresnel reflection at the air–substrate interface of a solar cell inevitably occurs because of the contrast of refractive index between air and transparent substrates, which is one of the most important optical losses for photovoltaic conversion efficiency. , More precisely, the generally used low iron glasses or plastic substrates with refractive indices ( n ) around 1.5 show typically visible light transmittance of ∼92% at normal incidence, resulting in 8–10% reflection loss of the normal incident light, and this value can go up to 30% if all incident angles are taken into considerations . One of the most feasible methods to virtually eliminate Fresnel loss is to deposit an antireflection coating (ARC) on the transparent substrate. ,, For example, introducing multiple layers of higher and lower reflective indices alternatively with destructive interference, depositing a stack of homogeneous ultrathin transparent layers with graded index profiles to remove the step difference in refractive indices, or fabricating wavelength scale structured ARC to guide the incident light propagation toward the device. , …”
Section: Introductionmentioning
confidence: 99%
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“…Fresnel reflection at the air–substrate interface of a solar cell inevitably occurs because of the contrast of refractive index between air and transparent substrates, which is one of the most important optical losses for photovoltaic conversion efficiency. , More precisely, the generally used low iron glasses or plastic substrates with refractive indices ( n ) around 1.5 show typically visible light transmittance of ∼92% at normal incidence, resulting in 8–10% reflection loss of the normal incident light, and this value can go up to 30% if all incident angles are taken into considerations . One of the most feasible methods to virtually eliminate Fresnel loss is to deposit an antireflection coating (ARC) on the transparent substrate. ,, For example, introducing multiple layers of higher and lower reflective indices alternatively with destructive interference, depositing a stack of homogeneous ultrathin transparent layers with graded index profiles to remove the step difference in refractive indices, or fabricating wavelength scale structured ARC to guide the incident light propagation toward the device. , …”
Section: Introductionmentioning
confidence: 99%
“…9 Fresnel reflection at the air−substrate interface of a solar cell inevitably occurs because of the contrast of refractive index between air and transparent substrates, which is one of the most important optical losses for photovoltaic conversion efficiency. 22,23 More precisely, the generally used low iron glasses or plastic substrates with refractive indices (n) around 1.5 show typically visible light transmittance of ∼92% at normal incidence, 24−26 resulting in 8−10% reflection loss of the normal incident light, 27 and this value can go up to 30% if all incident angles are taken into considerations. 28 most feasible methods to virtually eliminate Fresnel loss is to deposit an antireflection coating (ARC) on the transparent substrate.…”
Section: ■ Introductionmentioning
confidence: 99%
“…Remarkable decrease in reflectance of a hydrogenated silicon nitride layer intended for c‐Si solar cells was achieved after its treatment in argon plasma; moreover, the layer was grown in PECVD process conducted in a mixture of NH 3 and H 2 gases. [ 104 ] When fabricating c‐Si nano‐structured solar cells, one‐step process based on implementation of ICP discharge was necessary to synthesize simultaneously and anti‐reflection and n‐layer by etching the p‐type silicon wafers in argon‐hydrogen plasma with optimized parameters. [ 105 ] A roll‐to‐roll plasma sputtering system was employed to produce antireflective and self‐cleaning plasma‐polymerized fluorocarbon layer to be incorporated to perovskite solar cells.…”
Section: Architecturementioning
confidence: 99%
“…They are mainly used as very effective antireflection coatings in the production of crystalline silicon (c-Si) and multicrystalline silicon (mc-Si) solar cells [ 1 , 2 ]. The hydrogen content in the layers effectively passivates the material’s surface and suppresser surface recombination [ 3 , 4 , 5 , 6 , 7 , 8 ]. SiN x :H layers with various levels of nitrogen content are widely used in optoelectronics.…”
Section: Introductionmentioning
confidence: 99%