A low-temperature zinc plasma was generated by secondary ionization using an electron cyclotron resonance argon plasma. The ionization efficiency of zinc samples of the metal, the bromide, and the iodide were examined at different sample crucible temperatures. It was found that the ionization rate of zinc metal is the highest among the tested samples. The observed reaction rate constants α, defined as α = n Zn + /n Zn n Ar + in the present work, are 1.8 × 10 −18 m −3 , 1.7 × 10 −19 m −3 and 3.7 × 10 −19 m −3 for zinc metal, zinc bromide, and zinc iodide, respectively. The large reaction constant of zinc metal may be due to the small dissociation energy into atom vapour, compared with the large dissociation energies of the zinc halides.