Argon Implantation in Tetrahedral Amorphous Carbon Deposited by Filtered Cathodic Vacuum Arc

Marques, F. C.; Viana, G.A.; Motta, E. F.; Silva, D. S.; Wisnivesky, D.; Côrtes, Andresa Deoclídia Soares; Aguiar, Marina R.

doi:10.1007/s11665-012-0401-2

Cited by 5 publications

(3 citation statements)

References 56 publications

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“…The "knock-on" process transforms sp 2 into sp 3 bonds, which is responsible for the increase in the compressive stress of the films [13,[18][19][20]. For energies above 100 eV, the stress reaches a limit with a subtle decrease trend towards higher energy due to the "thermal spike" effect, which promotes a distortion in the carbon matrix creating defects and consequent relaxation of the network.…”

Section: Resultsmentioning

confidence: 99%

The Effect of Stress in the Density of States of Amorphous Carbon Films Determined by X-Ray Excited Auger Electron Spectroscopy

Barbieri

Marques

2017

Advances in Materials Science and Engineering

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Amorphous carbon films can be prepared with a large variety of structure and have been used in a number of technological applications. Many of their properties have been determined, but very little is known concerning the effect of pressure on their properties. In this work we investigate the influence of pressure of graphite-like amorphous carbon films on the density of states (DOS) using X-ray Excited Auger Electron Spectroscopy (XAES) and the second derivate method of the XAES. The films were deposited by ion beam deposition and simultaneously bombarded with argon, which is responsible for the variation of the film stress, reaching extremely high values (4.5 GPa). Marked variations of the density of states of the , , sp, and s components were observed with increasing stress.

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Section: Resultsmentioning

confidence: 99%

The Effect of Stress in the Density of States of Amorphous Carbon Films Determined by X-Ray Excited Auger Electron Spectroscopy

Barbieri

Marques

2017

Advances in Materials Science and Engineering

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“…[1][2][3][4][5] However, the DLC films, especially, tetrahedral amorphous carbon (ta-C) films, have attracted considerable interest in properties comparable with those of nitride and carbide films, such as high hardness, low friction coefficient, excellent wear resistance, and anti-affinity with wear debris. [6][7][8][9] Among the many preparation methods for DLC films, the filtered cathodic vacuum arc (FCVA) technique is an effective and common method. [10][11][12] Although FCVA has a significant advantage in the highly ionized plasma of energetic carbon ions, its disadvantage is the poor controllability of arc motion that will affect the quality of the films in micro-manufacturing.…”

Section: Introductionmentioning

confidence: 99%

“…Diamond‐like carbon (DLC) films, transition metal nitride and carbide films that are prepared on cutting tools and drillings have been applied to improve their properties 1–5 . However, the DLC films, especially, tetrahedral amorphous carbon (ta‐C) films, have attracted considerable interest in properties comparable with those of nitride and carbide films, such as high hardness, low friction coefficient, excellent wear resistance, and anti‐affinity with wear debris 6–9 …”

Section: Introductionmentioning

confidence: 99%

Structure and mechanical properties of diamond‐like carbon films prepared by pulsed laser‐induced cathodic vacuum arc technique

Feng

Zheng

Wang

et al. 2023

Surface & Interface Analysis

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Diamond‐like carbon (DLC) films are prepared by pulsed laser‐induced cathodic vacuum arc technique with various arc voltages. The purpose of the research is to investigate the influence of the arc voltage on the structure, mechanical, and tribological properties of DLC films. The results from Raman spectra and XPS show that with increasing arc voltage from 180 to 280 V, the sp3 content in the DLC film increases from 43.2 to 56.9 at%, then follows by a significant decrease with further increasing arc voltage to 330 V. The trend in the mechanical properties of DLC films correlates well with the sp3 content in the films. The maximum hardness, modulus, and adhesion critical load (Lc) of the DLC film is obtained in the film deposited at 280 V; the values of that are 46.4 GPa, 380.6 GPa, and 620 mN, respectively. The friction coefficient of the films is between 0.1 and 0.2, and the film deposited at 280 V has the minimum wear rate with a value of 3.2 × 10−17 m3/m.N. It is concluded that the DLC films with high sp3 content (ta‐C, tetrahedral amorphous carbon) not only have good mechanical properties but also have excellent tribological properties, which provides a promising application for wear resistance parts.

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Raman and EPR spectroscopic studies of chromium-doped diamond-like carbon films

Савченко

Vorlı́ček

Prokhorov

et al. 2018

Diamond and Related Materials

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Argon Implantation in Tetrahedral Amorphous Carbon Deposited by Filtered Cathodic Vacuum Arc

Cited by 5 publications

References 56 publications

The Effect of Stress in the Density of States of Amorphous Carbon Films Determined by X-Ray Excited Auger Electron Spectroscopy

The Effect of Stress in the Density of States of Amorphous Carbon Films Determined by X-Ray Excited Auger Electron Spectroscopy

Structure and mechanical properties of diamond‐like carbon films prepared by pulsed laser‐induced cathodic vacuum arc technique

Raman and EPR spectroscopic studies of chromium-doped diamond-like carbon films

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