ArF-excimer laser ablation experiments on Cycloolefin Copolymer (COC)

Sabbert, D.; Landsiedel, Robert; Bauer, Hans-Dieter; Ehrfeld, W.

doi:10.1016/s0169-4332(98)00334-1

Cited by 26 publications

(17 citation statements)

References 7 publications

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“…This finding demonstrates that adding mCOC to the composite increased the compatibility at the interface, reducing the discrepancy between the T g values of CNE and mCOC. [23][24][25] This result agrees with the SEM observations in Figure 7(b). Table 3 presents the flame retardancy of CCL composites with arrangements A-F.…”

Section: Characterization Of CCL Compositesupporting

confidence: 91%

A flame-retardant copper-clad laminate composite made of (metallocenebased cyclic olefin copolymer/glass)/ cresol-novolak epoxy with low dielectricity

Rwei

Lin

Yeh

2014

Textile Research Journal

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A CNE (cresol-novolak epoxy) composite of CCL (copper-clad laminate), comprising glass fabrics and mCOC (metallocenebased cyclic olefin copolymer) fabrics with various laminated structures, was fabricated and its dielectricity at high frequency was examined. The dielectric constant, D k , at 5 GHz of a conventional glass/CNE composite is 4.0, whereas that of a seven alternately layered mCOC/glass/CNE composite with an externally facing mCOC layer is 2.3. In the same manner, the former has a loss tangent, D f , of 0.035, whereas the latter has a loss tangent, D f , of 0.007. In addition, the decrease of D f with increasing mCOC content is not linear but logarithmical. The T g (glass transition temperature) and scanning electron microscope results reveal the good compatibility of the mCOC and CNE at the interface between them. An optimal compression process, which involved a pressure of 20 kg/cm 2 at 185 C for 120 min, was followed by setting at 120 C for 30 min, to relax the residual stress that built up inside the mCOC prepregs, with the purpose of fabricating a mCOC/glass/CNE CCL without any tilt angle. The worsening of the flame retardancy that is caused by replacing some of the nonflammable glass layers with organic mCOC layers can be overcome by blending more 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide dicyandiamide hardener into the CNE matrix. The highest flameretardant standard, of grade UL 94 V0, can be achieved with a phosphorus content of the glass/CNE and glass/ mCOC/CNE CCLs of 8000 and 12,500 ppm, respectively. Briefly, a flame-retardant mCOC/glass/CNE composite of CCL operated at high frequency is successfully produced.

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Section: Characterization Of CCL Compositesupporting

confidence: 91%

A flame-retardant copper-clad laminate composite made of (metallocenebased cyclic olefin copolymer/glass)/ cresol-novolak epoxy with low dielectricity

Rwei

Lin

Yeh

2014

Textile Research Journal

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“…Laser ablation has been used on other polymeric materials, such as PMMA (Johnson et al 2001); however, so far, its use for microstructuring of COP has not been subject of any intensive study yet. Sabbert et al (1999) presented some results using an ArF excimer laser (k = 193 nm) and determined that the ablation depth of COP is 3.4 times lower than for PMMA. Nevertheless, Sabbert et al claim that this lower ablation depth can be used to better control the depth of the device structures.…”

Section: Laser Ablationmentioning

confidence: 99%

Cyclic olefin polymers: emerging materials for lab-on-a-chip applications

Nunes

Ohlsson

Ordeig

et al. 2010

Microfluid Nanofluid

361

258

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Cyclic olefin polymers (COPs) are increasingly popular as substrate material for microfluidics. This is due to their promising properties, such as high chemical resistance, low water absorption, good optical transparency in the near UV range and ease of fabrication. COPs are commercially available from a range of manufacturers under various brand names (Apel, Arton, Topas, Zeonex and Zeonor). Some of these (Apel and Topas) are made from more than one kind of monomer and therefore also known as cyclic olefin copolymers (COCs). In order to structure these materials, a wide array of fabrication methods is available. Laser ablation and micromilling are direct structuring methods suitable for fast prototyping, whilst injection moulding, hot embossing and nanoimprint lithography are replication methods more appropriate for low-cost production. Using these fabrication methods, a multitude of chemical analysis techniques have already been implemented. These include microchip electrophoresis (MCE), chromatography, solid phase extraction (SPE), isoelectric focusing (IEF) and mass spectrometry (MS). Still much additional work is needed to characterise and utilise the full potential of COP materials. This is especially true within optofluidics, where COPs are still rarely used, despite their excellent optical properties. This review presents a detailed description of the properties of COPs, the available fabrication methods and several selected applications described in the literature.

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“…Similar results could be found in literature. [27,28] There are several factors that can influence the taper angle of microstructure, including the incident laser fluence and the numerical aperture of the projection system. [28] Recently, Paterson et al [29] have used a numerical model to predict the surface profile of trench structures successfully.…”

Section: Photoablation Propertiesmentioning

confidence: 99%