Area-Selective Growth of Zinc Oxide Nanowire Arrays for Piezoelectric Energy Harvesting
Frank Eric Boye Anang,
Xuanwei Wei,
Jiushuai Xu
et al.
Abstract:In this work, we present the area-selective growth of zinc oxide nanowire (NW) arrays on patterned surfaces of a silicon (Si) substrate for a piezoelectric nanogenerator (PENG). ZnO NW arrays were selectively grown on patterned surfaces of a Si substrate using a devised microelectromechanical system (MEMS)-compatible chemical bath deposition (CBD) method. The fabricated devices measured a maximum peak output voltage of ~7.9 mV when a mass of 91.5 g was repeatedly manually placed on them. Finite element modelin… Show more
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