Arc-shaped cantilever beam RF MEMS switch for low actuation voltage

Khan, Aamir Saud; Shanmuganantham, T.

doi:10.1109/iccs1.2017.8326009

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“…The goal of this work is to develop tree microaccelerometers MEMS using finite element modelling (FEM), with the aim being to verify their behaviors. [2], [4], [6], [7], [8], [11]- [15] In these cases, microaccelerometers structure design is analysed by mesh, where such mesh separates everything into parts, and each part is Published Nov 16, 2019 Jose Luis. Gonzalez Vidal a * is with Universidad Autonoma del Estado de Hidalgo, Pachuca, Hidalgo CP 42082 (e-mail: jlvidal@uaeh.edu.mx).…”

Section: Introductionmentioning

confidence: 99%

Design, Structural and Electrostatic Analysis of Three MEMS Micro Accelerometers

Vidal

Osorno

Camarillo

et al. 2019

EJECE

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Three low-power MEMS micro-accelerometers were designed, the first with variable distance and the last with variable area. Then, electrostatic analysis and simulation by the finite element method was performed to show its behavior and performance. In the simulation and analysis the software COMSOL MULTIPHYSICS 5.1 was used. The results show that the variable area micro-accelerometer exhibits the best relationship between behavior and performance.

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