2004
DOI: 10.1016/j.colsurfa.2003.09.028
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Aqueous silane-surfactant co-dispersions for deposition of hydrophobic coatings onto pre-oxidized polysilicon

Abstract: The application of hydrophobic coatings onto pre-oxidized polysilicon substrates is an effective method to prevent or reduce "release" as well as "in-use" stiction in microelectromechanical systems (MEMS). A chemical system consisting of a commercially available water dispersible silane (Siliclad ® ) has previously been shown to be useful in rendering polysilicon surfaces hydrophobic. In this paper, the improvement of the stability of such a chemical system is described. The objectives of the work reported in … Show more

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Cited by 12 publications
(4 citation statements)
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“…35 The water content during the immobilization protocol was precisely optimized since an absence of water leads to the formation of incomplete silane layers, while an excess of it gives a non-uniform silane lm due to pre-deposition oligomerization. 31 A pH range of 3.2 to 3.7 was maintained during the silanization step so as to orient the amine groups away from the glass surface, 36 and to facilitate interaction between the AgNPs and silane moieties. 31 The surface underwent a thorough water rinse and ultrasonication before further use.…”
Section: Silver Nanoparticle Immobilization On Aeaptmsfunctionalized ...mentioning
confidence: 99%
“…35 The water content during the immobilization protocol was precisely optimized since an absence of water leads to the formation of incomplete silane layers, while an excess of it gives a non-uniform silane lm due to pre-deposition oligomerization. 31 A pH range of 3.2 to 3.7 was maintained during the silanization step so as to orient the amine groups away from the glass surface, 36 and to facilitate interaction between the AgNPs and silane moieties. 31 The surface underwent a thorough water rinse and ultrasonication before further use.…”
Section: Silver Nanoparticle Immobilization On Aeaptmsfunctionalized ...mentioning
confidence: 99%
“…900, 1040, 1120, and 1260 cm À1 ) have been assigned for indicating silane poly-condensation and the formation of Si-O-Si bonds. [42][43][44][45][46] Furthermore, to demonstrate the change of hydrophilic interactions within the reaction system over time, the absorbance spectra that cover water's stretching and bending vibrations are shown in Fig. 6B and S3, † respectively.…”
Section: Resultsmentioning
confidence: 99%
“…The band at 980-890 cm 21 was assigned to the Si-OH band. 42 The peaks observed *700-800 cm 21 were due to the vibrations of Si-O groups in the PFOTES solution. Moreover, peaks *1145 cm 21 , 1242 cm 21 and 1147 cm 21 , 1244 cm 21 were attributed to the vibrations of CF 2 and CF 3 groups of specimens II and III respectively.…”
Section: Atr-ir Spectroscopy Of Shp Surfacesmentioning
confidence: 97%