Approach for monitoring the topography of laser-induced periodic surface structures using a diffraction-based measurement method

Schröder, Nikolai; Fischer, Christoph; Soldera, Marcos; Bouchard, Felix; Voisiat, Bogdan; Lasagni, Andrés Fabían

doi:10.1016/j.matlet.2022.132794

Cited by 9 publications

(7 citation statements)

References 9 publications

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“…Diffractive approach: to monitor and evaluate the surface topography of periodic structures, different approaches can be used, for instance scatterometry [35,36]. This technique consists of illuminating the structure surface with a low power laser beam and later capturing the diffracted beams with a camera system.…”

Section: Process Monitoring In Dlipmentioning

confidence: 99%

The development of direct laser interference patterning: past, present, and new challenges

Lasagni,

Voisiat

2024

Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XXIV

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This manuscript introduces a comprehensive overview in the field of Direct Laser Interference Patterning (DLIP) with a focus on its evolution over the last years, its current status, and the emerging challenges it faces. Starting with the emerging stages of DLIP, attention will be directed towards the role played by the development of innovative optical systems, which have been instrumental in pushing the boundaries of precision and control. Examples of surface functionalization achieved through DLIP techniques are also showcased, emphasizing the transformative impact that DLIP has had across various industries, from the enhancement of material properties to the facilitation of new functionalities. Furthermore, consideration will be given to the evolving landscape of inline monitoring approaches within DLIP. These monitoring techniques are poised to address the intricate challenges associated with real-time quality control and process optimization in DLIP applications.

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Section: Process Monitoring In Dlipmentioning

confidence: 99%

The development of direct laser interference patterning: past, present, and new challenges

Lasagni,

Voisiat

2024

Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XXIV

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“…[ 19,20 ] Particularly, a scatterometry‐based method showed the potential to characterize the spatial periods and structure heights of low‐spatial frequency laser‐induced periodic surface structures (LIPSS). [ 19 ] The concept of the method is based on measuring and analyzing the light diffracted from the laser‐treated surfaces to characterize the topography from the intensity distribution of the resulting diffraction orders (DOs). This phenomenon has been known for decades and several numerical approaches, such as the finite element method (FEM), finite difference time domain (FDTD), and rigorous coupled‐wave analysis (RCWA), have been developed along with dedicated commercial software (e.g., Lumerical FDTD, PCGrate, GSolver) to simulate the resulting diffraction patterns.…”

Section: Introductionmentioning

confidence: 99%

“…This promising technology is fast, nondestructive, and can resolve features down to the submicroscale. [19,20] Particularly, a scatterometry-based method showed the potential to characterize the spatial periods and structure heights of low-spatial frequency laser-induced periodic surface structures (LIPSS). [19] The concept of the method is based on measuring and analyzing the light diffracted from the lasertreated surfaces to characterize the topography from the intensity DOI: 10.1002/adem.202201889 Process monitoring in laser-based manufacturing has become a forward-looking strategy for industrial-scale laser machines to increase process reliability, efficiency, and economic profit.…”

Section: Introductionmentioning

confidence: 99%

“…[19,20] Particularly, a scatterometry-based method showed the potential to characterize the spatial periods and structure heights of low-spatial frequency laser-induced periodic surface structures (LIPSS). [19] The concept of the method is based on measuring and analyzing the light diffracted from the lasertreated surfaces to characterize the topography from the intensity DOI: 10.1002/adem.202201889 Process monitoring in laser-based manufacturing has become a forward-looking strategy for industrial-scale laser machines to increase process reliability, efficiency, and economic profit. Moreover, monitoring techniques are successfully used in laser surface texturing workstations to improve and guarantee the quality of the produced workpieces by analyzing the resulting surface topography.…”

Section: Introductionmentioning

confidence: 99%

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Diffraction‐Based Strategy for Monitoring Topographical Features Fabricated by Direct Laser Interference Patterning

et al. 2023

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“…Some indirect optical imaging methods has been implemented to characterize periodic surfaces by observing the diffraction pattern caused by the back-scattered light. But artifacts may arise when the periodicity breaks or the initial structure orientation is changed 23 , 24 . Structured illumination have been used as an alternative to increase the modulation transfer function of the microscope and thus the image contrast on non-fluorescent periodic samples.…”

Section: Introductionmentioning

confidence: 99%

Nondestructive inspection of surface nanostructuring using label-free optical super-resolution imaging

Aguilar

Khalil

Pallarés-Aldeiturriaga

et al. 2023

Sci Rep

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Ultrafast laser processing can induce surface nanostructurating (SNS) in most materials with dimensions close to the irradiation laser wavelength. In-situ SNS characterization could be key for laser parameter’s fine-tuning, essential for the generation of complex and/or hybrid nanostructures. Laser Induced Periodic Surface Structures (LIPSS) created in the ultra-violet (UV) range generate the most fascinating effects. They are however highly challenging to characterize in a non-destructive manner since their dimensions can be as small as 100 nm. Conventional optical imaging methods are indeed limited by diffraction to a resolution of $$\approx 150$$ ≈ 150 nm. Although optical super-resolution techniques can go beyond the diffraction limit, which in theory allows the visualization of LIPSS, most super-resolution methods require the presence of small probes (such as fluorophores) which modifies the sample and is usually incompatible with a direct surface inspection. In this paper, we demonstrate that a modified label-free Confocal Reflectance Microscope (CRM) in a photon reassignment regime (also called re-scan microscopy) can detect sub-diffraction limit LIPSS. SNS generated on a titanium sample irradiated with a $$\lambda =257$$ λ = 257 nm femtosecond UV-laser were characterized with nanostructuring period ranging from 105 to 172 nm. Our label-free, non-destructive optical surface inspection was done at 180 $$\upmu$$ μ m$$^2$$ 2 /s, and the results are compared with commercial SEM showing the metrological efficiency of our approach.

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Approach for monitoring the topography of laser-induced periodic surface structures using a diffraction-based measurement method

Cited by 9 publications

References 9 publications

The development of direct laser interference patterning: past, present, and new challenges

The development of direct laser interference patterning: past, present, and new challenges

Diffraction‐Based Strategy for Monitoring Topographical Features Fabricated by Direct Laser Interference Patterning

Nondestructive inspection of surface nanostructuring using label-free optical super-resolution imaging

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