In-situ non-destructive method of surface analysis at plasma/ion treatment is presented. A differentially pumped energy analyzer is used for ion scattering and ionized recoil spectroscopy under grazing incidence conditions in automated ion mass monochromator. Build in Penning plasma source is used for plasma/ion treatment of targets.For investigation of plasma surface interaction in fusion devices it is very important to realize during plasma irradiation in situ analysis of surface layers composition and its thickness. In this work first experimental results obtained at new facility based on "MEPhI mass monochromator"[1] with low and medium energy ion spectroscopy are presented.A differentially pumped energy analyzer is used for scattered ions and ionized recoil spectroscopy under grazing incidence conditions. The mass monochromator permits to separate the ions with mass to charge ratios of up to M/Z = 100 and maximum beam energy of up to 40 keV. Ion beam with low level of impurities is produced by the duoplasmatron with an automated power supply and mass flow controller of work gases. With helium as a working gas, admixture of impurities (with hydrogen ions predominating) is less that 1% as compared to current of He + ions). The energy spread of the beam at 5 keV is~5×10 −3 , with angular divergence of~0.01 rad. Figure 1. Energy spectra of positive (top) and negative (bottom) ions knocked out from the target during bombardment with Ar + with energy of 7,5 keV at different temperatures.The interaction chamber is pumped by a TMP with pumping speed ∼10 3 l/s. A build-in plasma/ion source, with a penning discharge operating at relatively low working pressures (∼10 −4 Torr) provides a working gas (Ar) pressure in chamber less than ∼10 −3 Torr at a current density of 100mkA/cm 2 .The analyzer detects the ions scattered at angle θ = 16°. A solid angle of scattered particle is ∼1.1 ×10 −3 sr with the half width of scattering angle ∆ϑ = ±0.6°, its energy resolution is not greater than 0.8%. The ion current is detected using a secondary emission multiplier. Figure 2. Behavior of the ion C − and O − peaks sputtered from the W surface depending on the time during heating surface and irradiation Xe + and typical energy spectra positive Ar + ions reflected from the surface and/or embossed surface (small picture).Since hydrocarbons and water (hydrogen, oxygen, carbon) are the main light impurities in fusion facilities (apart from specially introduced boron or lithium), these elements (being in close affinity with an electron) can be detected via the analysis of negatively charged recoil atoms during irradiation by ions of inert gases. This allows increasing the sensitivity of the method due to the low probability of formation negative ions of inert gases. Figure 1 shows the energy spectrum of positive (top) and negative (bottom) ions obtained during bombardment of tungsten target with 7,5 keV Ar + ions. The bottom plot clearly shows two maxima corresponding to the recoils of C − and O − .Ions of heavy noble gases are more suit...