2012
DOI: 10.3103/s1062873812060214
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Applying scattered-ion spectroscopy to the analyzing of plasma-surface interactions

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Cited by 7 publications
(4 citation statements)
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“…This device [4] allows analysis of thin surface films with atomic mass considerably different from substrate atoms in the range from 5 to 60 Å using the energy analysis of knocked out and scattered positive and negative ions directly during surface treatment using built in plasma source. High sensitivity to thin film thickness is obtained due to low angle ion scattering geometry in which the diagnostic H + beam takes longer path in thin film and therefore losses more energy making energy spectrum more sensitive to film thickness.…”
Section: Methodsmentioning
confidence: 99%
“…This device [4] allows analysis of thin surface films with atomic mass considerably different from substrate atoms in the range from 5 to 60 Å using the energy analysis of knocked out and scattered positive and negative ions directly during surface treatment using built in plasma source. High sensitivity to thin film thickness is obtained due to low angle ion scattering geometry in which the diagnostic H + beam takes longer path in thin film and therefore losses more energy making energy spectrum more sensitive to film thickness.…”
Section: Methodsmentioning
confidence: 99%
“…1. It includes diagnostic ion beam with energy range 1-15 keV generated by duoplasmatron (1), mass-separation electromagnet (2), target-cathode covered by thin-oxide film (3), movable anode (4) for in situ CVC measurement, electrostatic energy analyzer (5) for scattered ion beam diagnostic, and secondary electron multiplier (6). The setup is evacuated with turbomolecular pumps to 10 −7 torr.…”
Section: Methodsmentioning
confidence: 99%
“…A residual gas composition is controlled by Extor XT100M quadrupole mass spectrometer. The thermochemical water vapor source [6] based on Ca(OH) 2 thermal decomposition is used for experiments with water adsorption on the cathode. 0093-3813 © 2015 IEEE.…”
Section: Methodsmentioning
confidence: 99%
“…In this work first experimental results obtained at new facility based on "MEPhI mass monochromator" [1] with low and medium energy ion spectroscopy are presented.…”
mentioning
confidence: 98%