Applying Grey Relational Analysis and Fuzzy Neural Network to Improve the Yield of Thin-Film Sputtering Process in Color Filter Manufacturing

Chiang, Yu-Min

doi:10.3182/20090603-3-ru-2001.00067

13th IFAC Symposium on Information Control Problems in Manufacturing 2009

DOI: 10.3182/20090603-3-ru-2001.00067

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Applying Grey Relational Analysis and Fuzzy Neural Network to Improve the Yield of Thin-Film Sputtering Process in Color Filter Manufacturing

Yu-Min Chiang¹

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Applying Grey Relational Analysis and Fuzzy Neural Network to Improve the Yield of Thin-Film Sputtering Process in Color Filter Manufacturing

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