Applications of the FIB lift-out technique for TEM specimen preparation

Giannuzzi, Lucille A.; Drown, J. L.; Brown, S. R.; Irwin, R. B.; Stevie, F. A.

doi:10.1002/(sici)1097-0029(19980515)41:4<285::aid-jemt1>3.0.co;2-q

Cited by 278 publications

(151 citation statements)

References 17 publications

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“…Cross-sectional TEM specimens from selected etch pits were prepared using the focused ion beam (FIB) lift-out method [23]. A FEI Nova 200 dual beam (DB) FIB was used to prepare the TEM specimens.…”

Section: Methodsmentioning

confidence: 99%

DEFECT SELECTIVE ETCHING OF THICK AlN LAYERS GROWN ON 6H-SIC SEEDS – A TRANSMISSION ELECTRON MICROSCOPY STUDY

et al. 2007

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In the present study, the type and densities of defects in AlN crystals grown on 6H-SiC seeds by the sublimation-recombination method were assessed. The positions of the defects in AlN were first identified by defect selective etching (DSE) in molten NaOH-KOH at 400 °C for 2 minutes. Etching produced pits of three different sizes: 1.8, 2.4, and 2.9 µ m. The etch pits were either aligned together forming a sub-grain boundary or randomly distributed. The smaller etch pits were either isolated or associated with larger etch pits. After preparing cross-sections of the pits by the focused ion beam (FIB) technique, transmission electron microscopy (TEM) was performed to determine the dislocation type (edge, mixed or screw) associated with a specific etch pit size. Preliminary TEM bright field and dark field imaging using different zone axes and diffraction vectors indicates an edge dislocation with a Burgers vector 1/3 ] 0 2 11 [ is associated with the smallest etch pit size.

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Section: Methodsmentioning

confidence: 99%

DEFECT SELECTIVE ETCHING OF THICK AlN LAYERS GROWN ON 6H-SIC SEEDS – A TRANSMISSION ELECTRON MICROSCOPY STUDY

et al. 2007

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“…FIB-SEM is based on the unique combination of an ion and an electron gun, where specimens can be positioned at the intersection point of the electron and ion beam with an accuracy of less than 1 µm. This permits simultaneous ion milling, nanosectioning and secondary electron imaging of the region of interest with a spatial resolution within the nanometre range (Giannuzzi et al, 1998(Giannuzzi et al, , 1999. The sample stage was tilted at 52…”

Section: Methodsmentioning

confidence: 99%

Focused ion beam nano-sectioning and imaging: a new method in characterisation of palaeopalynological remains

Villanueva‐Amadoz

Benedetti

Méndez

et al. 2012

Grana

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“…Some pioneering studies using FIB -TEM have been reported in the field of Earth science (e.g., Dobrzhinetskaya et al, 2003;Wirth, 2004;Bleiner et al, 2006). In Earth science, most samples are petrographic thin sections or massive materials, and the conventional "lift -out (or pickup) method" (Overwijk et al, 1993;Giannuzzi et al, 1998) is used as the FIB milling procedure. Irifune et al (2005) have used the conventional lift -out method to prepare a TEM foil from the sample recovered from the LHDAC.…”

Section: Introductionmentioning

confidence: 99%

Application of FIB system to ultra-high-pressure Earth science

Miyahara

Sakai

Ohtani

et al. 2008

Journal of Mineralogical and Petrological Sciences

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The conventional focused ion beam (FIB) sample preparation technique "lift -out method" was modified for the reliable analysis of a laser -heated diamond anvil cell (LHDAC) sample. Box -shaped grooves were prepared in the LHDAC specimen in order to recover a block using a gallium ion beam in the vicinity of the area to be characterized by transmission electron microscope (TEM). The recovered block was fixed on the stage of a copper (or molybdenum) grid and thinned by the gallium ion beam in order to obtain a TEM foil. Our modified liftout method allows us to thin the entire vertical section (from the upper anvil surface to the lower anvil surface) of the LHDAC sample.

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Applications of the FIB lift-out technique for TEM specimen preparation

Cited by 278 publications

References 17 publications

DEFECT SELECTIVE ETCHING OF THICK AlN LAYERS GROWN ON 6H-SIC SEEDS – A TRANSMISSION ELECTRON MICROSCOPY STUDY

DEFECT SELECTIVE ETCHING OF THICK AlN LAYERS GROWN ON 6H-SIC SEEDS – A TRANSMISSION ELECTRON MICROSCOPY STUDY

Focused ion beam nano-sectioning and imaging: a new method in characterisation of palaeopalynological remains

Application of FIB system to ultra-high-pressure Earth science

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