2005
DOI: 10.1117/12.630659
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Applications of surface-enhanced Raman spectroscopy (SERS) for biosensing: an analysis of reproducible, commercially available substrates

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Cited by 20 publications
(12 citation statements)
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“…[48][49][50][51][52] These substrates were developed using Si-based semiconductor fabrication techniques. 52 Klarite substrates are fabricated using a well-defined Silicon fabrication technique in which a silicon diode mask is defined by optical lithography, and then KOH surface etched.…”
Section: Klarite Sers Substratesmentioning
confidence: 99%
“…[48][49][50][51][52] These substrates were developed using Si-based semiconductor fabrication techniques. 52 Klarite substrates are fabricated using a well-defined Silicon fabrication technique in which a silicon diode mask is defined by optical lithography, and then KOH surface etched.…”
Section: Klarite Sers Substratesmentioning
confidence: 99%
“…Following the fabrication of the underlying silicon surface, approximately 100 nm of gold (Au) is deposited onto the surface. It is designed for one time use and packed in a vacuum packaging to avoid degradation [34].…”
Section: A Substratesmentioning
confidence: 99%
“…(80,(95)(96)(97)(98) These substrates were developed using Si-based semiconductor fabrication techniques. (98) Klarite substrates are fabricated using a well defined silicon fabrication technique in which a silicon diode mask is defined by optical lithography, and then potassium hydroxide (KOH) surface etched.…”
Section: Introductionmentioning
confidence: 99%