Applications of optical coatings on spectral selective structures

法布里-珀罗光学微腔及其应用

“…(a) Schematic diagram of combinatorial etching technique; (b1) infrared integrated F -P filter with 16 channels [4] ; (b2) transmittance of infrared integrated F -P filter with 16 channels [4] ; (c1) nearinfrared integrated F -P filter with 128 channels [5] ; (c2) transmittance of nearinfrared integrated F -P filter with 128 channels [5] ; (d1) -(d4) realizing inorbit verification of No. 10 Shijian Satellite [57] 1623009 -6 5 Fabrication of integrated metal F -P filter using electron beam grayscale lithography [60] . 6 Fabrication of integrated F -P filter using laser directwriting grayscale lithography [10] .…”