2011
DOI: 10.1016/j.vacuum.2010.11.008
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Applications of non evaporable getter pump in vacuum metrology

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Cited by 21 publications
(4 citation statements)
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“…As reported by Maccallini et al [2], NEGs are widely used as pumps in industry, research and development (R&D) labs, research centers and large physics projects like accelerators, synchrotrons or fusion reactors [7,8]. Usually NEGs are preferred to others UHV and XHV systems (like turbo molecular, cryogenic or sputter-ion pumps) in those cases in which it is necessary to avoid vibration and generation of electromagnetic disturbances and when the space requirement is an issue.…”
Section: Introductionmentioning
confidence: 99%
“…As reported by Maccallini et al [2], NEGs are widely used as pumps in industry, research and development (R&D) labs, research centers and large physics projects like accelerators, synchrotrons or fusion reactors [7,8]. Usually NEGs are preferred to others UHV and XHV systems (like turbo molecular, cryogenic or sputter-ion pumps) in those cases in which it is necessary to avoid vibration and generation of electromagnetic disturbances and when the space requirement is an issue.…”
Section: Introductionmentioning
confidence: 99%
“…In view of the wide application value of extremely high vacuum measurement and calibration technology in space program, nuclear fusion, and high-energy particle accelerator, etc., a UHV/XHV vacuum standard was constructed in LIP based on the creatively proposed ideas of flow separation and selective pumping background extension [6][7][8] (Figure 4). The measurement range is 10 -10 -10 -1 Pa, and the expanded uncertainty is 7-0.9% (k = 2).…”
Section: Calibration Of Total Pressurementioning
confidence: 99%
“…However, the lower limit of SEM method is limited to 10 -5 Pa resulting from the outgassing of the calibration chamber. We proposed a novel approach based on the idea of selective pumping, with which the lower limit of the SEM standard was extended to 10 -7 Pa [5,6]. DFM is a widely recognized method for high vacuum calibration, based on which LIP developed a standard with a lower limit of 10 -7 Pa [7].…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, the CAVM has a potential to become the original standard of vacuum metrology, and then develop into a new generation of vacuum metrology technology [18][19][20][21] .…”
Section: Introductionmentioning
confidence: 99%