1995
DOI: 10.1088/0022-3727/28/4a/019
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Applications of multiple-crystal diffractometry

Abstract: The elucidation of the structure of semiconductor multilayers can be adequately determined by X-ray methods but the interpretation is not always straightforward. In this paper we introduce the idea of full three-dimensional diffraction-space mapping to obtain information on the three-dimensional structure of imperfect materials. We also stress the importance of this method for the interpretation of the data from high-resolution X-ray diffractometry. The presence of defects and diffraction effects can create si… Show more

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Cited by 61 publications
(30 citation statements)
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“…For temperature dependent ͑10-300 K͒ spectroscopic measurements, QW sample is mounted in a closed cycle helium refrigerator. HRXRD measurements are performed by using an PANalytical X'PERT diffractometer, 20 equipped with a Ge ͑220͒ monochromator ͑Bartels type, four reflections͒, with a beam divergence of ϳ12 arc sec in the scattering plane for Cu K␣ 1 x-rays ͑ = 1.5406 Å͒. All HRXRD measurements are done with a 1°open detector in a plane parallel to the scattering plane.…”
Section: Methodsmentioning
confidence: 99%
“…For temperature dependent ͑10-300 K͒ spectroscopic measurements, QW sample is mounted in a closed cycle helium refrigerator. HRXRD measurements are performed by using an PANalytical X'PERT diffractometer, 20 equipped with a Ge ͑220͒ monochromator ͑Bartels type, four reflections͒, with a beam divergence of ϳ12 arc sec in the scattering plane for Cu K␣ 1 x-rays ͑ = 1.5406 Å͒. All HRXRD measurements are done with a 1°open detector in a plane parallel to the scattering plane.…”
Section: Methodsmentioning
confidence: 99%
“…2, we present one of the RLP map of asymmetric (10 15) reflection. Following Fewster's analysis, the direction of the main axis of the RLP relates to tilted growth, while the elliptical spreading parallel to Q x -axis correlates with lateral mosaic block size [12,13]. It is seen that the shape of RLP in Fig.…”
Section: Resultsmentioning
confidence: 86%
“…While it is important that rocking curves for evaluating twist be taken under quasi-symmetric geometry, rather than asymmetric geometry, the 2-D intensity distribution of the reciprocal lattice point (RLP) from an asymmetric reflection is affected mostly by the combination of the following: lattice variation in the direction of surface normal, tilt, and lateral correlation length [12,13]. In Fig.…”
Section: Resultsmentioning
confidence: 99%
“…¦ÔÎË àÕË ÓÇÐÕÅÇÐÑÑÒÕËÚÇÔÍËÇ àÎÇÏÇÐÕÞ ÔÑÊAEÂÐÞ Ô ÖÚÈÕÑÏ ÏÐÑÅÑ-ÍÓÂÕÐÑÅÑ ÑÕÓÂÉÇÐËâ, ÕÑ ËÐÕÇÐÔËÄÐÑÔÕË ÒÔÇÄAEÑÒËÍÑÄ Ð AEË×ÓÂÍÙËÑÐÐÑÌ ÍÂÓÕËÐÇ ÔÖÜÇÔÕÄÇÐÐÑ ÖÏÇÐßÛÂáÕÔâ,  ËÐÑÅAEÂ Ë ÄÑÄÔÇ ÒÓÑÒÂAEÂáÕ [24]. ±ÑàÕÑÏÖ ÄÇÔßÏ ÄÂÉÐÑÌ âÄÎâÇÕÔâ ÒÓÑÃÎÇÏÂ, ÔÄâÊÂÐÐÂâ Ô ÄÎËâÐËÇÏ ËÐÔÕÓÖÏÇÐ-ÕÂÎßÐÞØ ËÔÍÂÉÇÐËÌ Ð ×ÑÓÏËÓÑÄÂÐËÇ ÍÂÓÕ ÓÂÔÒÓÇAEÇÎÇ-ÐËâ ËÐÕÇÐÔËÄÐÑÔÕË ÓÂÔÔÇâÐËâ Ä ÑÃÓÂÕÐÑÏ ÒÓÑÔÕÓÂÐÔÕÄÇ [25 ë 27].…”
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