Applications of Microelectromechanical Systems in Industrial Processes and Services

Dean, Robert N.; Luque, A.

doi:10.1109/tie.2009.2013691

Cited by 88 publications

(25 citation statements)

References 83 publications

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“…Droplet-based microfluidic devices [1] have gained a long-standing interest over the past two decades due to their enormous potential in scientific research and engineering applications ranging from chemical reactions [2], biotechnology [3], flow and heat transfer in micro-electromechanical system (MEMS) [4,5]. One of the commonly used microfluidic devices for droplet formation is the T-junction depicted schematically in Fig.…”

Section: Introductionmentioning

confidence: 99%

Three dimensional simulations of droplet formation in symmetric and asymmetric T-junctions using the color-gradient lattice Boltzmann model

Liu

Sun

et al. 2015

International Journal of Heat and Mass Transfer

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Section: Introductionmentioning

confidence: 99%

Three dimensional simulations of droplet formation in symmetric and asymmetric T-junctions using the color-gradient lattice Boltzmann model

Liu

Sun

et al. 2015

International Journal of Heat and Mass Transfer

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“…In recent years, with micro-processing technology continues to progress, MEMS gyroscopes have been widely used in many fields, such as industrial automation, automotive navigation system, and inertial measurement [1]. As is known to all, MEMS gyroscopes have the advantages of small size, light weight, low cost, mass production and so on.…”

Section: Introductionmentioning

confidence: 99%

A novel demodulation algorithm for MEMS gyroscope digital control system

Yang

2014

2014 IEEE International Conference on Systems, Man, and Cybernetics (SMC)

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In order to further improve the performance of MEMS gyroscope, a novel demodulation algorithm all-phase Fast Fourier Transform (apFFT) based on FPGA is proposed to the digital control system, in which the drive detection signal and sensitive axis signal are demodulated respectively. Combining with automatic gain control (AGC) and phase-locked loop (PLL), the closed-loop drive control and high precision demodulated output of MEMS gyroscope have been implemented. A printed circuit board based on FPGA is manufactured and the corresponding experiment is carried out. The experimental results indicate that the digital control system with the apFFT demodulation algorithm of MEMS gyroscope achieves good performance. The amplitude variance of drive detection signal at room temperature is less than 2ppm. The relative error of phase difference between drive signal and drive detection signal is 33ppm. The bias stability of tested MEMS gyroscope is 2.62deg/h with the scale factor being 7.95mV/deg/s. The tested gyroscope with all-phase FFT demodulation algorithm has a better ARW performance of 0.16deg/h/Hz 1/2 than that using multiplication demodulation algorithm with ARW performance of 1.04deg/h/Hz 1/2 . The Experiment verifies that the proposed apFFT demodulation algorithm is feasible and effective.

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“…MEMS technology is incorporated into a large number of different areas, from sensors and actuators to active RF components, from optics to energy generation [1]. Despite being still an emerging field the market for MEMS devices is huge with hundreds of millions of MEMS devices already shipped and being used in applications such as automotive sensing, computer games and smart phones, to name but a few.…”

Section: Introductionmentioning

confidence: 99%

Direct comparison of stylus and resonant methods for determining Young's modulus of single and multilayer MEMS cantilevers

Boyd¹,

Nock

Weiland

et al. 2011

Sensors and Actuators A: Physical

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As microelectromechnical systems (MEMS) becomes more complex and are produced in even greater numbers it becomes increasingly important to have a full understanding of the mechanical properties of the commonly used MEMS materials. One of the most important properties for MEMS is the Young's modulus. This work describes the direct comparison of two methods often used for measuring the Young's modulus of thin film materials using micro-cantilever test structures: a load-deflection method and a resonant frequency method. The comparison was carried out for a range of materials, different cantilever geometries as well as for single and multilayer materials. It was found that both methods produce results that agree with each other and also agree with the values most often given in the literature.

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Applications of Microelectromechanical Systems in Industrial Processes and Services

Cited by 88 publications

References 83 publications

Three dimensional simulations of droplet formation in symmetric and asymmetric T-junctions using the color-gradient lattice Boltzmann model

Three dimensional simulations of droplet formation in symmetric and asymmetric T-junctions using the color-gradient lattice Boltzmann model

A novel demodulation algorithm for MEMS gyroscope digital control system

Direct comparison of stylus and resonant methods for determining Young's modulus of single and multilayer MEMS cantilevers

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