2015
DOI: 10.1039/c5cp00843c
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Applications of ALD MnO to electrochemical water splitting

Abstract: Atomic layer deposition (ALD) is an attractive method to deposit uniform catalytic films onto high surface area electrodes. One interesting material for ALD synthesis is MnOx, a promising earth-abundant catalyst for the oxygen evolution reaction (OER). It has previously been shown that catalysts beginning as MnO synthesized using ALD on smooth glassy carbon (s-GC) electrodes and Mn2O3 obtained upon annealing MnO on s-GC are active OER catalysts. Here, we use ALD to deposit MnO on high surface area GC (HSA-GC) … Show more

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Cited by 47 publications
(45 citation statements)
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References 52 publications
(75 reference statements)
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“…The resulting film thickness as a function of the number of cycles is shown in Figure a for growth at 160 °C. Manganicone MLD exhibits a constant growth rate of 0.9 Å per cycle up to at least 350 cycles, close to the growth rates observed for ALD of pure manganese oxide (≈1 Å per cycle) . Saturation curves (Figure b,c) verify the characteristic self‐limiting nature of the MLD process with increasing exposure time, though some variance in the growth rate is observed, as has been seen previously for ALD/MLD processes .…”
Section: Resultssupporting
confidence: 82%
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“…The resulting film thickness as a function of the number of cycles is shown in Figure a for growth at 160 °C. Manganicone MLD exhibits a constant growth rate of 0.9 Å per cycle up to at least 350 cycles, close to the growth rates observed for ALD of pure manganese oxide (≈1 Å per cycle) . Saturation curves (Figure b,c) verify the characteristic self‐limiting nature of the MLD process with increasing exposure time, though some variance in the growth rate is observed, as has been seen previously for ALD/MLD processes .…”
Section: Resultssupporting
confidence: 82%
“…One of the main limitations in the creation of new electrochemically active materials using MLD is the lack of studies on elements relevant for electrochemical applications. While most hybrid MLD studies focus on Al, Zn, and Ti, manganese oxide, for instance, can be used in both Li ion batteries as a cathode material and in the electrochemical conversion of water into oxygen via the oxygen evolution reaction (OER) . Despite its potential, only two studies have explored the use of MLD to synthesize manganese hybrid materials.…”
Section: Introductionmentioning
confidence: 99%
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“…19 Work continues in developing it as an OER catalyst, but the best illuminated results reported imply negative potentials (power losing cells) of several hundred millivolts after accounting for the photovoltage. Protection layers including graphene or other carbon films have also been explored [20][21][22] as has Ta 2 O 5 as a protection layer for nZnO absorbers, 23 but, in general produce worse results than those listed.…”
Section: Discussionmentioning
confidence: 99%
“…The low cost, stable, and adequately active transition metal oxides [6,7], hydroxides [8], sulfides [9], nitrides [10], layered double hydroxides [11,12] and perovskites [13,14] have been developed as alternative electrocatalysts. Among them, metal oxides such as MnO 2 [15,16], NiO [17,18], Co 3 O 4 [7,19], and Fe 2 O 3 [20,21] are widely studied due to their wide range of properties such as diverse crystal structures, variable morphologies, and rich redox chemistry governed by coordination environments.…”
Section: Introductionmentioning
confidence: 99%