Application of the theory of micro switch group sensor (MSGS) to noise-affected switches

Nishiyama, Kiyohisa; Ward, MA; Al-Dadah, Raya

doi:10.1016/j.sna.2007.02.038

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“…MEMS actuators are integrated devices that generate motion by coupled physics field's interactions, typically through piezoelectric, electrostatic or electromagnetic effects. Examples of such MEMS can be found in inkjet printer heads, scanning probe microscopes, miniature mechanical switches and game controllers [3][4][5]. Electrothermal actuators present a class of conventional MEMS devices with great potential for science and applications.…”

Section: Introductionmentioning

confidence: 99%

Coupled electrothermal–mechanical analysis for MEMS via model order reduction

Binion¹,

Chen²

2010

Finite Elements in Analysis and Design

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Section: Introductionmentioning

confidence: 99%

Coupled electrothermal–mechanical analysis for MEMS via model order reduction

Binion¹,

Chen²

2010

Finite Elements in Analysis and Design

View full text Add to dashboard Cite

Theory and experimental verification of micro switch group sensor (MSGS)

Nishiyama

Ward

Al-Dadah

2007

Physica Status Solidi (a)

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Due to the development of micro system technology (MST), mechanical structures of micro or nanometer dimension can be achieved. Devices in such small dimensions inevitably tend to be affected by Brownian motion and the errors caused by tolerance of fabrication, which decreases the accuracy of sensors. Micro Switch Group Sensor (MSGS) is a new type of sensor system which works by exploiting the stochastic features of noise and randomness within an array of switches. In this paper, the theory of MSGS is introduced. In the experimental work, the theory is verified with three noise affected switches using electronically generated noise. From the analysis, the theory is developed and it is shown that the behaviour of output signals agrees with the theory. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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Application of the theory of micro switch group sensor (MSGS) to noise-affected switches

Cited by 2 publications

References 5 publications

Coupled electrothermal–mechanical analysis for MEMS via model order reduction

Coupled electrothermal–mechanical analysis for MEMS via model order reduction

Theory and experimental verification of micro switch group sensor (MSGS)

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