Size-selected silver nanoclusters (NCs) were generated using a modulated pulsed power magnetron sputtering (MPP-MSP) system coupled with a mass spectrometer, and their formation mechanism was investigated by applying an extended Smoluchowski model. Attractive interactions between NC cations and anions were incorporated into the conventional Smoluchowski equations to explain the origin of the size tuning of Ag NCs prepared via MPP-MSP. Bunches overlapped as the repetition rate (f) and peak power (P p ) increased, resulting in the initial formation of large ionic nanoclusters, ultimately causing a reduction in the size of the NC ions due to neutralization via NC cation−anion charge recombination and the formation of aggregates.