Application of the O-lattice theory for the reconstruction of the high-angle near 90° tilt Si(110)/(001) boundary created by wafer bonding

Cherkashin, Nikolay; Kononchuk, Oleg; Reboh, S.; Hÿtch, Martin

doi:10.1016/j.actamat.2011.10.054

Cited by 6 publications

(1 citation statement)

References 18 publications

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“…In this work, we focus on the 90° 1 1 0 tilt boundary, but the approach is general to incommensurate interfaces in covalent materials. Our purpose is not to completely explain the atomic structure of the 90° 1 1 0 tilt grain boundary by energy considerations 19 , but rather to extract the local atomic structures from high-resolution experiments. Indeed, through pattern matching, the characteristics of the interface are highlighted and twodimensional coordinates are extracted.…”

Section: Introductionmentioning

confidence: 99%

Incommensurate grain boundary in silicon and the silver-ratio sequence

2019

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A scheme is proposed to solve the structure of incommensurate interfaces, starting from highresolution images of electron microscopy, supplemented by adapted simulation techniques and complemented by theoretical tools. Direct silicon bonding is a way to produce artificial interfaces, in particular incommensurate ones. We focus on a technology-driven tilt grain boundary in silicon. While the Fibonacci sequence, linked to the golden ratio, is a prototype of the quasicrystalline structures, a silver-ratio sequence allows us to analyze this incommensurate interface. The four-fold coordination of the Si atoms is kept at the interface.

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Section: Introductionmentioning

confidence: 99%

Incommensurate grain boundary in silicon and the silver-ratio sequence

2019

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Characterization of Process‐Induced Defects

Cherkashin¹,

Claverie²

2012

Transmission Electron Microscopy in Micro‐Nanoelectronics

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The β1 Triad-Related Configurations in a Mg-RE Alloy

Zhu

Zhang

et al. 2020

Metall Mater Trans A

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As the building block of a honeycomb precipitate network, the triadic arrangement of β1 strengthening precipitates is technologically important for the potential development of highly tuneable nanostructure in rare-earth (RE) containing Mg alloys. In this work, we provide systematic experimental observations of those impinged β1 variants in a Mg-Nd alloy, which are directly related to the characteristic triadic configuration. It is found that the isolated α-Mg crystal in a β1 triad has a 10.5° rotation when it has a perfect equilateral-triangular shape. This rotation angle decreases to ~9.4° when the isolated α-Mg crystal exhibits a non-equilateral shape. In this case, one or two of its lateral interfaces include a step with a height of 0.56 nm to reduce the lattice mismatch. Furthermore, the pre-stage prior to the formation of β1 triadic configuration is revealed for the first time. It originates from the implement of two β1 variants with the same sense of shear. The presence of such two variants, in the absence of the third variant, leads to a rotation of the α-Mg crystal in the small area close to the approaching ends of these two variants. A low-angle symmetrical tilt boundary around the [0001]α rotation axis is formed between the rotated and unrotated α-Mg crystals. Most of the tilt boundaries observed in this work have a tilt angle of ~4.7°. The atomic structure of such a tilt boundary is constructed using a crystallographic model and validated by molecular dynamics simulation. The unique distribution of Nd-rich solute clusters along the tilt boundary is qualitatively discussed based on crystallographic analysis.

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Application of the O-lattice theory for the reconstruction of the high-angle near 90° tilt Si(110)/(001) boundary created by wafer bonding

Cited by 6 publications

References 18 publications

Incommensurate grain boundary in silicon and the silver-ratio sequence

Incommensurate grain boundary in silicon and the silver-ratio sequence

Characterization of Process‐Induced Defects

The β1 Triad-Related Configurations in a Mg-RE Alloy

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