Application of Spectral Ellipsometry for Dielectric, Metal, and Semiconductor Films in Microelectronics Technology

Gaidukasov, R. A.; Miakonkikh, A. V.

doi:10.1134/s1063739723600073

Russ Microelectron

2024

DOI: 10.1134/s1063739723600073

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Application of Spectral Ellipsometry for Dielectric, Metal, and Semiconductor Films in Microelectronics Technology

R. A. Gaidukasov,

A. V. Miakonkikh

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Application of Spectral Ellipsometry for Dielectric, Metal, and Semiconductor Films in Microelectronics Technology

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References 46 publications

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