Application Of Rf (13.56 MHz) Arc Discharge For Plasma Chemical Conversion Of Volatile Fluorides

Abstract

The report discusses the use of a new type of plasma source of hydrogen plasma based on a RF (13.56 MHz) arc discharge of atmospheric pressure between two electrodes. This discharge was used for hydrogen reduction of the tetrafluorides of silicon, boron and molybdenum. As a result of the studies, the main regularities of the hydrogen reduction process were established and the main synthesized products were determined. Samples of carbides of silicon, boron and molybdenum were prepared.

Study of the Conversion of Carbon-containing and Organochlorine Impurities in the Process of Hydrogen Reduction of Silicon Tetrachloride by RF (40.68 MHz) Arc Discharge.

“…The temperature of the ends of the electrodes determined in this way is 1600 K. It can be assumed that gas in the nearelectrode region has the same temperature. Knowing the area of the heated surface of the electrode, estimated by the formula (1), the current is I ≈ 2.5 A which by order of magnitude coincides with the value I determined by the method [9].…”

“…The electric current in the gas under these conditions is determined by the characteristics of the external circuit. The characteristic value of the total current determined by the method described in [9] was I ≈ 2 A.…”