Application of quantum well-like thermocouple to thermoelectric energy harvester by BiCMOS process

Yang, Shih-Ming; Cong, Ming; Lee, T.

doi:10.1016/j.sna.2010.06.031

Cited by 26 publications

(2 citation statements)

References 23 publications

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“…Several devices were miniaturized using MEMS technology [4][5][6][7][8]. Microdevices fabricated by this technology have the benefits of small volume, high performance and low cost [9][10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology

2015

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Abstract:The fabrication and characterization of a thermoelectric energy harvester using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technology were presented. The thermoelectric energy harvester is composed of eight circular energy harvesting cells, and each cell consists of 25 thermocouples in series. The thermocouples are made of p-type and n-type polysilicons. The output power of the energy harvester relies on the number of the thermocouples. In order to enhance the output power, the energy harvester increases the thermocouple number per area. The energy harvester requires a post-CMOS process to etch the sacrificial silicon dioxide layer and the silicon substrate to release the suspended structures of hot part. The experimental results show that the energy harvester has an output voltage per area of 0.178 mV¨mm´2¨K´1 and a power factor of 1.47ˆ10´3 pW¨mm´2¨K´2.

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Section: Introductionmentioning

confidence: 99%

Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology

2015

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“…Their follow‐up study [ 107 ] adopted stacked polysilicon thermocouples in a μ‐TEGs with the maximum voltage factor of 3.952 V cm −2 K −1 and the maximum performance factor of 0.0473 μW cm −2 K −2 . Next, a thermocouple resembling a quantum well was used in 2011, [ 108 ] with a voltage factor of 0.241 V cm −2 K −1 and a maximum performance factor of 0.241 μW cm −2 K −2 . CMOS and post‐CMOS micro‐TE power generators made of 24 thermocouples connected in series and built from p‐ and n‐type polysilicon strips were shown by J. Kao et al A silicon dioxide layer is used to insulate the cold part from the heat source.…”

Section: Classification Of μ‐Tegsmentioning

confidence: 99%

Design and Fabrication of Microarchitected Thermoelectric Generators: Prospects and Challenges

Asadikouhanjani,

Zolfagharian,

Bodaghi

2024

Adv Eng Mater

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Solid state devices called thermoelectric generators (TEGs) can convert waste heat from production into electrical power. For emerging devices like thermally integrated energy‐autonomous devices, medicinal equipment, and Internet of things, µ‐TEGs are essential because they can produce power even from minor temperature gradients. An review of the history and state‐of‐the‐art of µ‐TEGs is provided in this article. In addition, it concentrates on highly effective approaches for achieving high‐performance miniature vertical thermoelectric (TE) devices. Design and optimizing methodologies for vertical µ‐TEGs are also investigated since their output power, efficiency and integrity are critical to the architecture. Improving electrical and mechanical performance may be achieved via optimization methods, including multi‐objective and finite‐dimensional optimization in three dimensions (3D). Additionally, the idea and latest advancements of employing the 3D micro‐additive manufacturing (micro‐AM) technique for producing µ‐TEGs are discussed, along with their advantages and disadvantages. The concept of “micro architected TEGs” as opposed to “µ ‐TEGs” is provided by the new paradigm of digital additive manufacturing and architected material concept, which also broadens the scope of material adaptability and innovative structural design. The difficulties experienced are summed up when increasing the output power of µ‐TEG and the prediction of future trends is the final step.This article is protected by copyright. All rights reserved.

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Recent Advances and Emerging Trends in Electrical and Electronic Materials

Gupta¹,

Gupta²

2015

Advanced Electrical and Electronics Materials

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Application of quantum well-like thermocouple to thermoelectric energy harvester by BiCMOS process

Cited by 26 publications

References 23 publications

Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology

Manufacturing and Characterization of a Thermoelectric Energy Harvester Using the CMOS-MEMS Technology

Design and Fabrication of Microarchitected Thermoelectric Generators: Prospects and Challenges

Recent Advances and Emerging Trends in Electrical and Electronic Materials

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