2019
DOI: 10.4028/www.scientific.net/ssp.293.97
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Application of PVD and ALD Methods for Surface Treatment of Al-Si-Cu Alloys

Abstract: The article presents the results of research on tribological properties and corrosion resistance of hybrid and individual coatings embedded with the ALD (Atomic Layer Deposition) and PVD (Physical Vapour Deposition) technique on aluminum alloy substrates. Al-Si-Cu alloys coated with hybrid ALD+PVD coatings show significantly higher abrasion resistance compared to uncoated samples. In particular, the TiO2+WC hybrid coating has the highest abrasion resistance. The highest resistance to corrosion is demonstrated … Show more

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Cited by 6 publications
(9 citation statements)
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“…A set of three state-of-the-art multilayer model samples was fabricated using an innovative hybrid system combining physical vapor deposition (PVD) and atomic layer deposition (ALD), which allows subsequent deposition processes to be conducted without breaking the vacuum conditions. This was an important technological advance (as, so far, the PVD and ALD processes were performed in separate vacuum chambers , ), allowing the layers’ surface oxidation to be avoided and multilayer production costs to be significantly reduced. Moreover, the combination of ALD and PVD provided us a unique opportunity of depositing multilayers composed of thin films with thicknesses varying by up to 2 orders of magnitude.…”
Section: Methodsmentioning
confidence: 99%
“…A set of three state-of-the-art multilayer model samples was fabricated using an innovative hybrid system combining physical vapor deposition (PVD) and atomic layer deposition (ALD), which allows subsequent deposition processes to be conducted without breaking the vacuum conditions. This was an important technological advance (as, so far, the PVD and ALD processes were performed in separate vacuum chambers , ), allowing the layers’ surface oxidation to be avoided and multilayer production costs to be significantly reduced. Moreover, the combination of ALD and PVD provided us a unique opportunity of depositing multilayers composed of thin films with thicknesses varying by up to 2 orders of magnitude.…”
Section: Methodsmentioning
confidence: 99%
“…In this hybrid system, the ALD layer seals the PVD layer, which is often defective due to its specific structure. In the combinations of CrN-Al 2 O 3 /TiO 2 and TiAlN/TiN/Al 2 O 3 , TiCN/Al 2 O 3 coatings obtained on steels, in which the Al 2 O 3 and TiO 2 phases are obtained by the ALD technique [26][27][28][29][30][31][32][33], take on the role of a sealant to provide very good corrosion resistance properties.…”
Section: Introductionmentioning
confidence: 99%
“…In 13 , the authors showed an improvement in the corrosion resistance of AZ31 magnesium alloy with a 100 nm thick ZrO 2 coating. Many studies show that the TiO 2 phase, in particular with an amorphous structure, has excellent anti-corrosion properties as a single layer (applied on a magnesium alloy—work 14 ) or as a sealing layer in a PVD/ALD hybrid coating PVD coating (obtained on substrates of resistant steel on corrosion and aluminium alloys 15 , 16 ). The authors confirmed the advantages of PVD/ALD hybrid coatings on various substrates by testing the following coating systems: CrN/Al 2 O 3 + TiO 2 , TiAlN + TiN/Al 2 O 3 , TiCN/Al 2 O 3 and the bimodal TiO 2 /nanoTiO 2 coating.…”
Section: Introductionmentioning
confidence: 99%
“…As a result of literature analysis and based on their research 14 – 16 , the authors in the present work applied the following coating systems to magnesium alloy substrates, which have not yet been investigated: Ti/Al 2 O 3 + TiO 2 and Ti + TiO 2 /Al 2 O 3 + TiO 2 were obtained by a hybrid PVD/ALD method. Al 2 O 3 /TiO 2 coating obtained by a single ALD technique.…”
Section: Introductionmentioning
confidence: 99%