Abstract:Non-contact corona-Kelvin metrology has been extensively used in the IC industry for over 20 years and has more recently been utilized in the photovoltaic (PV) industry for dielectric characterization. Application to leaky low temperature PV dielectrics required various enhancements to the technique, such as an accelerated time-resolved charge-measure cycle to mitigate leakage and longer wavelength illumination to eliminate photo-induced leakage observed in silicon-rich silicon nitrides (SiN,). These enhanceme… Show more
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