2013
DOI: 10.1166/jctn.2013.2785
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Application of Native Inhomogeneities to Increase Compactness of Vertical Field-Effect Transistors

Abstract: In this paper we consider an possibility to decrease dimensions of vertical field-effect transistors. Framework the considered approach it is occurs decreasing of depth of the transistors and increasing their density in integrated circuits.

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Cited by 30 publications
(37 citation statements)
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References 10 publications
(15 reference statements)
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“…3a for diffusion doping of materials and Fig. 3b for ion doping of materials) [15][16][17][18][19][20]. Framework the criteria one shall approximate real distributions of concentration of dopant by ideal step-wise distribution ψ (x,y,z).…”
Section: Discussionmentioning
confidence: 99%
“…3a for diffusion doping of materials and Fig. 3b for ion doping of materials) [15][16][17][18][19][20]. Framework the criteria one shall approximate real distributions of concentration of dopant by ideal step-wise distribution ψ (x,y,z).…”
Section: Discussionmentioning
confidence: 99%
“…3a for diffusion type of doping and 3b for ion type of doping). As optimal annealing time of dopant and/or radiation defects we determine compromise value of the required time time framework recently introduced criterion [15][16][17][18][19][20]. Based on the criterion we approximate real distribution of concentration of dopant by idealized step-wise function ψ (x, y,z).…”
Section: Discussionmentioning
confidence: 99%
“…If the annealing time is large, the distribution of concentration of dopant is too homogenous. We optimize the annealing time based on a recently introduced approach [11][12][13][14][15][16]. By applying the criterion we approximate real distribution of concentration of dopant by a step-wise function (see Figs.…”
Section: Discussionmentioning
confidence: 99%
“…1). Based on recently formulated recommendations to decrease dimensions of single transistors (both bipolar and field-effect) [11][12][13][14][15][16] we formulate recommendations to increase density of field-effect transistors framework the considered circuits. We assume, that the considered circuits were manufactured framework the considered in Fig.1 heterostructure.…”
Section: Introductionmentioning
confidence: 99%