Application of Micro Electrical Discharge Machining and Electrochemical Machining in Manufacturing of Micro‐Electromechanical Systems: A Review

Abstract

The paper deals with the classification, applications, and advantages of microelectromechanical systems (MEMS), materials, and technologies used. This area of production represents one of the most promising technologies of 21st century, with a big impact in manufacturing 4.0. Nowadays, MEMS fabrication methods have a very big influence in the area of medicine, and therefore the review applications of utmost importance like micromechanical stents or antenna stents are related. The study presents information about MEMS based micro-EDM, regarding working parameters and some examples of techniques used to realize MEMS devices. These have the purpose to minimize the cost together with the increase of the output technological parameters. The process capabilities of micro-ECM, associated with working parameters are also treated, and the potential applications in industries like automotive, aerospace, biomedical, security, communication, etc. Finally, some future challenges of MEMS application in the specified fields are exposed.