Application of Macro-micro Dual-drive System in Micro-EDM

Abstract

Micro-EDM technology has the advantages of no-contact and no-cutting force, it has been used in many fields. In order to use micro-EDM to machine proprietary micro array holes, which needs high precise of hole spacing and consistent hole diameter, a new macro-micro dual-drive system of micro-EDM have been made. It uses macro drive to move to a place, measures the error with the high precise grating, and uses micro drive to compensate the error. Online measurement proved that this method has important value if it will be used in micro-EDM.